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Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy
Sun LX(孙兰香)1,2,3; Wang W(汪为)1,2,3,4; Tian, XY(田雪咏)5; Zhang P(张鹏)1,2,3,4; Qi LF(齐立峰)1,2,3; Zheng, LM(郑黎明)1,2,3
Department工业控制网络与系统研究室
Source PublicationChinese Journal of Analytical Chemistry
ISSN0253-3820
2018
Volume46Issue:10Pages:1518-1527
Indexed BySCI ; EI
EI Accession number20184205956840
WOS IDWOS:000451326500003
Contribution Rank1
Funding OrganizationNational Key Research and Development Program of China ; National Natural Science Foundation of China ; Key Research Program of Frontier Sciences, Chinese Academy of Sciences ; Youth Innovation Promotion Association, Chinese Academy of Sciences
KeywordLaser-induced Breakdown Spectroscopy Microanalysis Ablation Crater Segregation Review
Abstract

The technique of micro-laser-induced breakdown spectroscopy (μLIBS) usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to conventional laser-induced breakdown spectroscopy (LIBS), it can provide more abundant form, structure, and content information on a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of μLIBS in the selection of laser source and the structure of optical path system is introduced, and its application in metal, semiconductor, animal and plant fields is reviewed. The existing problems and potential development direction is pointed out.

Language英语
WOS SubjectChemistry, Analytical
WOS KeywordTRACE ELEMENTAL ANALYSES ; QUANTITATIVE-ANALYSIS ; MATTER INTERACTION ; STEEL SAMPLE ; MU-LIBS ; PLASMA ; SPECTROMETRY ; ENERGY ; MICROANALYSIS ; ABLATION
WOS Research AreaChemistry
Funding ProjectNational Key Research and Development Program of China[2017YFF0106202] ; National Natural Science Foundation of China[61473279] ; Key Research Program of Frontier Sciences, Chinese Academy of Sciences[QYZDJ-SSW-JSC037] ; Youth Innovation Promotion Association, Chinese Academy of Sciences
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Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/23418
Collection工业控制网络与系统研究室
Corresponding AuthorSun LX(孙兰香)
Affiliation1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China
3.Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, China
4.University of Chinese Academy of Sciences, Beijing 100049, China
5.Central Research Institute, SIASUN Robot and Automation Co. Ltd, Shenyang 110168, China
Recommended Citation
GB/T 7714
Sun LX,Wang W,Tian, XY,et al. Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy[J]. Chinese Journal of Analytical Chemistry,2018,46(10):1518-1527.
APA Sun LX,Wang W,Tian, XY,Zhang P,Qi LF,&Zheng, LM.(2018).Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy.Chinese Journal of Analytical Chemistry,46(10),1518-1527.
MLA Sun LX,et al."Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy".Chinese Journal of Analytical Chemistry 46.10(2018):1518-1527.
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