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Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy
Sun LX(孙兰香)1,2,3; Wang W(汪为)1,2,3,4; Tian, XY(田雪咏)5; Zhang P(张鹏)1,2,3,4; Qi LF(齐立峰)1,2,3; Zheng, LM(郑黎明)1,2,3
作者部门工业控制网络与系统研究室
关键词Laser-induced breakdown spectroscopy Microanalysis Ablation crater Segregation Review
发表期刊Chinese Journal of Analytical Chemistry
ISSN0253-3820
2018
卷号46期号:10页码:1518-1527
收录类别EI
EI收录号20184205956840
产权排序1
资助机构National Key Research and Development Program of China (No.2017YFF0106202), the National Natural Science Foundation of China (No. 61473279), the Key Research Program of Frontier Sciences, Chinese Academy of Sciences (No. QYZDJ-SSW-JSC037), and the Youth Innovation Promotion Association, Chinese Academy of Sciences
摘要The technique of micro-laser-induced breakdown spectroscopy (μLIBS) usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to conventional laser-induced breakdown spectroscopy (LIBS), it can provide more abundant form, structure, and content information on a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of μLIBS in the selection of laser source and the structure of optical path system is introduced, and its application in metal, semiconductor, animal and plant fields is reviewed. The existing problems and potential development direction is pointed out.
语种英语
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/23418
专题工业控制网络与系统研究室
通讯作者Sun LX(孙兰香)
作者单位1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China
3.Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, China
4.University of Chinese Academy of Sciences, Beijing 100049, China
5.Central Research Institute, SIASUN Robot and Automation Co. Ltd, Shenyang 110168, China
推荐引用方式
GB/T 7714
Sun LX,Wang W,Tian, XY,et al. Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy[J]. Chinese Journal of Analytical Chemistry,2018,46(10):1518-1527.
APA Sun LX,Wang W,Tian, XY,Zhang P,Qi LF,&Zheng, LM.(2018).Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy.Chinese Journal of Analytical Chemistry,46(10),1518-1527.
MLA Sun LX,et al."Progress in Research and Application of Micro-Laser-Induced Breakdown Spectroscopy".Chinese Journal of Analytical Chemistry 46.10(2018):1518-1527.
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