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A method of laser focusing control in micro-laser-induced breakdown spectroscopy
Wang W(汪为)1,2,3,4; Sun LX(孙兰香)1,2,4; Zhang P(张鹏)1,2,3,4; Zheng, LM(郑黎明)1,2,4; Qi LF(齐立峰)1,2,4; Dong W(董伟)1,2,4
Department工业控制网络与系统研究室
Source PublicationPLASMA SCIENCE & TECHNOLOGY
ISSN1009-0630
2019
Volume21Issue:3Pages:1-9
Indexed BySCI ; EI ; CSCD
EI Accession number20191006590039
WOS IDWOS:000451072800004
CSCD IDCSCD:6446132
Contribution Rank1
Funding OrganizationNational Key Research and Development Program of China ; National Natural Science Foundation of China ; Key Research Program of Frontier Sciences, CAS ; Youth Innovation Promotion Association, CAS
KeywordLIBS microanalysis ablation crater focusing control
AbstractThis paper presents a method for the automatic adjustment of the laser defocusing amount in micro-laser-induced breakdown spectroscopy. A microscopic optical imaging system consisting of a CCD camera and a 20x objective lens was adopted to realize the method. The real-time auto-focusing of the system was achieved by detecting the effective pixels of the light spot generated by the laser pointer. The focusing accuracy of the method could achieve 3 mu m. The element concentrations of Mn and Ni in low-alloy steels were analyzed at a crater diameter of about 35 mu m using the presented method. After using the presented method, the determination coefficients of Mn and Ni both exceeded 0.997, with the root-mean-square errors being 0.0133 and 0.0395, respectively. Scanning analysis was performed on the inclined plane and the curved surface by means of focusing control and non-focusing control. Ten characteristic spectral lines of Fe were selected as the analysis lines. With the focusing control, the average relative standard deviations obtained on the inclined plane and curved surface were both less than 5%, and much less than the values without focusing control, 14.6% and 40.39%.
Language英语
WOS SubjectPhysics, Fluids & Plasmas
WOS KeywordQUANTITATIVE-ANALYSIS ; ELEMENTAL ANALYSIS ; MU-LIBS ; STEEL ; MICROANALYSIS ; SPECTROMETRY ; ALLOYS
WOS Research AreaPhysics
Funding ProjectNational Key Research and Development Program of China[2017YFF0106202] ; National Natural Science Foundation of China[61473279] ; Key Research Program of Frontier Sciences, CAS[QYZDJ-SSW-JSC037] ; Youth Innovation Promotion Association, CAS
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/23666
Collection工业控制网络与系统研究室
Corresponding AuthorSun LX(孙兰香)
Affiliation1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China
3.University of Chinese Academy of Sciences, Beijing 100049, People's Republic of China
4.Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China
Recommended Citation
GB/T 7714
Wang W,Sun LX,Zhang P,et al. A method of laser focusing control in micro-laser-induced breakdown spectroscopy[J]. PLASMA SCIENCE & TECHNOLOGY,2019,21(3):1-9.
APA Wang W,Sun LX,Zhang P,Zheng, LM,Qi LF,&Dong W.(2019).A method of laser focusing control in micro-laser-induced breakdown spectroscopy.PLASMA SCIENCE & TECHNOLOGY,21(3),1-9.
MLA Wang W,et al."A method of laser focusing control in micro-laser-induced breakdown spectroscopy".PLASMA SCIENCE & TECHNOLOGY 21.3(2019):1-9.
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