SIA OpenIR  > 机器人学研究室
AFM扫描图像重构算法的改进
Alternative TitleImprovement of Reconstruction Algorithm of AFM Scanning Images
袁帅; 董再励; 缪磊; 席宁; 王越超
Department机器人学研究室
Source Publication纳米技术与精密工程
ISSN1672-6030
2009
Volume7Issue:3Pages:259-264
Indexed ByEI ; CSCD
EI Accession number20092412123506
CSCD IDCSCD:3531378
Contribution Rank1
Funding Organization国家高技术研究发展计划(863)项目(2009AA03Z316); 国家自然科学基金重点项目(60635040); 辽宁省博士启动基金资助项目
Keyword原子力显微镜 多孔铝薄膜 探针盲建模 数学形态学 扫描图像
Abstract针对原子力显微镜(AFM)纳米成像中存在的失真问题,研究了通过探针建模实现AFM扫描图像重构方法.目前探针盲建模算法在重构AFM图像时存在较大误差,因此提出基于探针模型预估计的AFM扫描图像重构方法.该方法采用分区探针针尖建模,并通过基于该探针模型的反卷积运算实现AFM扫描图像重构,获得比较接近真实形貌的AFM扫描图像.文中介绍了算法的具体步骤,通过仿真和实验结果证明,该方法能够有效降低AFM图像重构时引入的误差,得到的图像更能反映样品表面真实的形貌。
Other AbstractAtomic force microscope(AFM) images contain distortions induced by the finite size of the tip.Reconstruction of the images allows one to remove the influence of tip shape and analyze the image at the nano-scale.However there are a lot of errors in the reconstruction of the image using blind tip evaluation,and these errors can be eliminated with the new method proposed in the paper based on pre-estimation of the tip.This method builds the tip model based on the zoning of the probe shape,and reconstructs the ...
Language中文
Citation statistics
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/2386
Collection机器人学研究室
Corresponding Author袁帅
Affiliation1.中国科学院沈阳自动化研究所国家机器人学重点实验室
2.中国科学院研究生院
3.密歇根州立大学电子和计算机工程系
Recommended Citation
GB/T 7714
袁帅,董再励,缪磊,等. AFM扫描图像重构算法的改进[J]. 纳米技术与精密工程,2009,7(3):259-264.
APA 袁帅,董再励,缪磊,席宁,&王越超.(2009).AFM扫描图像重构算法的改进.纳米技术与精密工程,7(3),259-264.
MLA 袁帅,et al."AFM扫描图像重构算法的改进".纳米技术与精密工程 7.3(2009):259-264.
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