Knowledge Management System of Shenyang Institute of Automation, CAS
| A General Throughput Model for Parallel Cluster tools | |
Zheng XH(郑秀红)1,2,3; Yu HB(于海斌)1 ; Hu JT(胡静涛)1,2
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| Department | 工业信息学研究室 |
| Conference Name | International Colloquium on Computing, Communication, Control, and Management (CCCM 2010) |
| Conference Date | Augest 20-22, 2010 |
| Conference Place | Yangzhou, CHINA |
| Author of Source | IEEE Technol Management Council, Yangzhou Univ, Intelligent Informat Technol Appl Res Assoc, Jiangsu Comp Fed, Yangzhou Assoc Sci & Techynol |
| Source Publication | 2010 INTERNATIONAL COLLOQUIUM ON COMPUTING, COMMUNICATION, CONTROL, AND MANAGEMENT (CCCM2010), VOL I |
| Publisher | IEEE |
| Publication Place | New York |
| 2010 | |
| Pages | 341-344 |
| Indexed By | CPCI（ISTP） |
| WOS ID | WOS:000393717600089 |
| Contribution Rank | 1 |
| ISBN | 978-1-4244-7380-9 |
| Keyword | parallel cluster tools throughput model timing diagram |
| Abstract | To effectively evaluate and analyze performance of cluster tools in semiconductor manufacturing, the paper presents a throughput model for parallel cluster tools.For developping this model, the timing diagram is applied to describe the usage of the chamber and robot in parallel processing of cluster tools. Finally, the theoretical model which indicates the relationship between the number of chamber, processing time, transport time, and throughtput is deduced. This model can analyze and computer the wafer period and the batch period fast and accurately. |
| Language | 英语 |
| Citation statistics | |
| Document Type | 会议论文 |
| Identifier | http://ir.sia.cn/handle/173321/24116 |
| Collection | 工业信息学研究室 |
| Corresponding Author | Zheng XH(郑秀红) |
| Affiliation | 1.Key Laboratory of Industrial Informatics, Shenyang Institute of Automation, CAS, Shenyang 110016, China 2.Graduate School of the Chinese Academy of Sciences, CAS, Beijing 100039, China 3.School of Computer Science and Technology, Shenyang Institute of Chemical Technology, Shenyang, 110142, China |
| Recommended Citation GB/T 7714 | Zheng XH,Yu HB,Hu JT. A General Throughput Model for Parallel Cluster tools[C]//IEEE Technol Management Council, Yangzhou Univ, Intelligent Informat Technol Appl Res Assoc, Jiangsu Comp Fed, Yangzhou Assoc Sci & Techynol. New York:IEEE,2010:341-344. |
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| File Name/Size | DocType | Version | Access | License | ||
| A general throughput（204KB） | 会议论文 | 开放获取 | CC BY-NC-SA | View Download | ||
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