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基于精确探针模型的AFM图像重构研究
Alternative TitleAFM image reconstruction based on accurate tip model
袁帅; 董再励; 缪磊; 席宁; 王越超
Department机器人学研究室
Source Publication仪器仪表学报
ISSN0254-3087
2009
Volume30Issue:6Pages:1117-1122
Indexed ByEI ; CSCD
EI Accession number20093112233938
CSCD IDCSCD:3621289
Contribution Rank1
Funding Organization国家自然科学基金重点项目(60635040) ; 国家863计划(2009AA03Z316) ; 辽宁省博士启动基金资助项目
KeywordAfm 探针模型 盲建模算法 图像重构
Abstract

原子力显微镜技术已在纳米成像中得到了普遍应用。但实验表明,AFM图像在水平方向分辨率较低,其中探针针尖形貌是影响扫描图像分辨率的关键因素之一。为了提高AFM扫描图像的分辨率,改善成像质量,一种可行的方法是通过建立探针模型后,重构扫描图像。在已有的探针建模方法中,普遍采用盲建模算法。针对目前盲建模算法中降噪阈值难以优化问题,提出了一种降噪阈值最优估计新方法。该方法可以使盲建模算法更准确地建立扫描方向上的探针形貌轮廓,进而完成3D探针模型。通过应用AFM探针扫描多空铝和标准栅格实验,介绍了探针针尖形貌精确建模的方法。然后使用数学形态学的腐蚀运算对标准栅格的AFM成像进行了重构,验证了上述方法的有效性。实验结果证明,重构后的图像中降低了探针针尖形貌的失真影响,可以显著改善扫描探针显微镜成像的水平分辨率。

Other Abstract

Atom force microscopy has been generally applied in obtaining nano-scale images.The shape and size of the tip are the key factors affecting the precision of the scanning image.In order to get high precision image,the tip shape is required to be estimated and used to reconstruct the scanning image.Recently several algorithms have been put forward,and the blind tip estimation algorithm among them is widely used.This algorithm has difficulties in estimating the optimal noise threshold to reduce the noise effec...

Language中文
Citation statistics
Cited Times:4[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/2426
Collection机器人学研究室
Corresponding Author袁帅
Affiliation1.中国科学院沈阳自动化研究所国家机器人学重点实验室
2.中国科学院研究生院
3.密歇根州立大学电子和计算机工程系
Recommended Citation
GB/T 7714
袁帅,董再励,缪磊,等. 基于精确探针模型的AFM图像重构研究[J]. 仪器仪表学报,2009,30(6):1117-1122.
APA 袁帅,董再励,缪磊,席宁,&王越超.(2009).基于精确探针模型的AFM图像重构研究.仪器仪表学报,30(6),1117-1122.
MLA 袁帅,et al."基于精确探针模型的AFM图像重构研究".仪器仪表学报 30.6(2009):1117-1122.
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