| Design and implementation of FA networking control software that accords with SEMI standards | |
Jin N(金妮) ; Xu AD(徐皑冬); Liu MZ(刘明哲); Wang CX(王晨曦)
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| Department | 工业控制网络与系统研究室 |
| Conference Name | 4th International Conference on Communication and Information Processing, ICCIP 2018 |
| Conference Date | November 2-4, 2018 |
| Conference Place | Qingdao, China |
| Source Publication | ICCIP 2018 - Proceedings of 2018 4th International Conference on Communication and Information Processing |
| Publisher | ACM |
| Publication Place | New York |
| 2018 | |
| Pages | 117-120 |
| Indexed By | EI |
| EI Accession number | 20191106628806 |
| Contribution Rank | 1 |
| ISBN | 978-1-4503-6534-5 |
| Keyword | IC equipment SEMI FA |
| Abstract | As the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards. |
| Language | 英语 |
| Document Type | 会议论文 |
| Identifier | http://ir.sia.cn/handle/173321/24390 |
| Collection | 工业控制网络与系统研究室 |
| Corresponding Author | Jin N(金妮) |
| Affiliation | Key Laboratory of Networked Control Systems, Chinese Academy of Sciences, Shenyang Institute of Automation, China |
| Recommended Citation GB/T 7714 | Jin N,Xu AD,Liu MZ,et al. Design and implementation of FA networking control software that accords with SEMI standards[C]. New York:ACM,2018:117-120. |
| Files in This Item: | Download All | |||||
| File Name/Size | DocType | Version | Access | License | ||
| Design and implement（428KB） | 会议论文 | 开放获取 | CC BY-NC-SA | View Download | ||
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