SIA OpenIR  > 工业控制网络与系统研究室
Design and implementation of FA networking control software that accords with SEMI standards
Jin N(金妮); Xu AD(徐皑冬); Liu MZ(刘明哲); Wang CX(王晨曦)
Department工业控制网络与系统研究室
Conference Name4th International Conference on Communication and Information Processing, ICCIP 2018
Conference DateNovember 2-4, 2018
Conference PlaceQingdao, China
Source PublicationICCIP 2018 - Proceedings of 2018 4th International Conference on Communication and Information Processing
PublisherACM
Publication PlaceNew York
2018
Pages117-120
Indexed ByEI
EI Accession number20191106628806
Contribution Rank1
ISBN978-1-4503-6534-5
KeywordIC equipment SEMI FA
AbstractAs the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/24390
Collection工业控制网络与系统研究室
Corresponding AuthorJin N(金妮)
AffiliationKey Laboratory of Networked Control Systems, Chinese Academy of Sciences, Shenyang Institute of Automation, China
Recommended Citation
GB/T 7714
Jin N,Xu AD,Liu MZ,et al. Design and implementation of FA networking control software that accords with SEMI standards[C]. New York:ACM,2018:117-120.
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