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Phase unwrapping in optical metrology via denoised and convolutional segmentation networks
Zhang JC(张俊超)1,2,3; Tian, Xiaobo2; Shao, Jianbo2; Luo HB(罗海波)1; Liang, Rongguang2
Department光电信息技术研究室
Source PublicationOPTICS EXPRESS
ISSN1094-4087
2019
Volume27Issue:10Pages:14903-14912
Indexed BySCI ; EI
EI Accession number20192106955409
WOS IDWOS:000469220500113
Contribution Rank1
Funding OrganizationChina Scholarship Council (CSC) ; National Science Foundation (NSF)
AbstractThe interferometry technique is corn commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 27 pi ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional phase unwrapping approaches are time-consuming and noise sensitive. To address those issues, we propose a new approach, where we transfer the task of phase unwrapping into a multi-class classification problem and introduce an efficient segmentation network to identify classes. Moreover, a noise-to-noise denoised network is integrated to preprocess noisy wrapped phase. We have demonstrated the proposed method with simulated data and in a real interferometric system. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Language英语
WOS SubjectOptics
WOS KeywordTRANSPORT
WOS Research AreaOptics
Funding ProjectChina Scholarship Council (CSC)[201704910730] ; National Science Foundation (NSF)[1455630] ; China Scholarship Council (CSC)[201704910730] ; National Science Foundation (NSF)[1455630]
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/24727
Collection光电信息技术研究室
Corresponding AuthorLiang, Rongguang
Affiliation1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.College of Optical Sciences, University of Arizona, Tucson, AZ 85721, United States
3.University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Zhang JC,Tian, Xiaobo,Shao, Jianbo,et al. Phase unwrapping in optical metrology via denoised and convolutional segmentation networks[J]. OPTICS EXPRESS,2019,27(10):14903-14912.
APA Zhang JC,Tian, Xiaobo,Shao, Jianbo,Luo HB,&Liang, Rongguang.(2019).Phase unwrapping in optical metrology via denoised and convolutional segmentation networks.OPTICS EXPRESS,27(10),14903-14912.
MLA Zhang JC,et al."Phase unwrapping in optical metrology via denoised and convolutional segmentation networks".OPTICS EXPRESS 27.10(2019):14903-14912.
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