SIA OpenIR  > 工艺装备与智能机器人研究室
Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry
Peng B(彭博)1; Qu, XH(曲兴华)1; Zhang FM(张福民)1; Tang, Guoqing1; Zhang TY(张天宇)2; Zhao, Xianyu1
Department工艺装备与智能机器人研究室
MOST Discipline CatalogueZhang FM(张福民)
Source PublicationIEEE Photonics Technology Letters
ISSN10411-135
2019
Volume31Issue:15Pages:1285-1288
Indexed BySCI ; EI
EI Accession number20193007231048
WOS IDWOS:000476796700022
Contribution Rank2
KeywordUltrafast optics measurement dispersive interferometry EIIT
AbstractMethod to accurately measure both refractive index and the thickness of glass is investigated. The method combines equal inclination interference with dispersive interferometry. The interference signal, which is detected by the spectrometer, contains different frequencies and can be demodulated with high accuracy. The experiments indicate that the standard deviation of the thickness is better than the 35 nm, while the standard deviation of the measured refractive indices is below 5.76 × 10-6. Furthermore, absolute angles, between 0° and 51°, can be measured with a repeatability within 5′.
Language英语
WOS SubjectEngineering, Electrical & Electronic ; Optics ; Physics, Applied
WOS KeywordGROUP REFRACTIVE-INDEX ; DISTANCE MEASUREMENT ; ARBITRARY DISTANCE ; LONG ; AIR
WOS Research AreaEngineering ; Optics ; Physics
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/25310
Collection工艺装备与智能机器人研究室
Affiliation1.Tianjin University, Tianjin 300072, China
2.Shenyang Institute of Automation, Shenyang 110016, China
Recommended Citation
GB/T 7714
Peng B,Qu, XH,Zhang FM,et al. Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry[J]. IEEE Photonics Technology Letters,2019,31(15):1285-1288.
APA Peng B,Qu, XH,Zhang FM,Tang, Guoqing,Zhang TY,&Zhao, Xianyu.(2019).Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry.IEEE Photonics Technology Letters,31(15),1285-1288.
MLA Peng B,et al."Absolute Angle and Glass Thickness Measurement Based on Dispersive Interferometry".IEEE Photonics Technology Letters 31.15(2019):1285-1288.
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