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Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review
Wang XD(王晓朵)1,2; Yu HB(于海波)1,2; Li PW(李佩温)1,2,3; Zhang, YZ(章昱昭)1,2,4; Wen YD(文扬东)1,2,4; Qiu Y(邱野)1,2,4; Liu Z(刘柱)1,2; Li, YunPeng1,5; Liu LQ(刘连庆)1,2
Department机器人学研究室
Source PublicationOptics and Laser Technology
ISSN0030-3992
2021
Volume135Pages:1-11
Indexed BySCI ; EI
EI Accession number20204609497214
WOS IDWOS:000597289800006
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China [grant numbers 61727811, 61973298, 61803366 and 61821005] ; External Cooperation Program of Chinese Academy of Sciences [grant number 173321KYSB20170015] ; Interdisciplinary Innovation Team of Chinese Academy of Sciences [grant number JCTD-2019-09] ; Liaoning Revitalization Talents Program [grant number XLYC1807006] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences [grant number Y201943] ; Fundamental Research Funds for the Central Universities [grant number D2017020]
KeywordFemtosecond laser processing Parallel processing Microlens array Micro/nano grating Photon crystal Optical fiber
Abstract

The unique advantages of surface and volume processing enabled by femtosecond laser fabrication makes it one of the most powerful tools for manufacturing optical and photonic devices based on complex three-dimensional structures with diverse functions. In this review, we focus on the recent advancements of femtosecond laser fabrication technologies and their versatile applications in different fields (e.g., nanotechnology, soft robotics, optics, and optoelectronics). Herein, the characteristics and development of laser direct writing, spatial light modulator-based fabrication and interference-based approaches are reviewed. Furthermore, typical applications and approaches related to the manufacturing of cutting-edge optical devices including microlens arrays, micro/nano gratings, photonic crystals, and optical fibers are summarized. Finally, the current challenges and emerging trends of this technology are discussed.

Language英语
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/27910
Collection机器人学研究室
Corresponding AuthorYu HB(于海波); Liu LQ(刘连庆)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Science, Shenyang 110016, China
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China
3.Northeastern University, Shenyang 110016, China
4.University of Chinese Academy of Sciences, Beijing 100049, China
5.Criminal Investigation Police University of China, Shenyang 110016, China
Recommended Citation
GB/T 7714
Wang XD,Yu HB,Li PW,et al. Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review[J]. Optics and Laser Technology,2021,135:1-11.
APA Wang XD.,Yu HB.,Li PW.,Zhang, YZ.,Wen YD.,...&Liu LQ.(2021).Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review.Optics and Laser Technology,135,1-11.
MLA Wang XD,et al."Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review".Optics and Laser Technology 135(2021):1-11.
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