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Alternative TitleAFM based nanomanipulation system with 3D force feedback
田孝军; 王越超; 刘连庆; 焦念东; 董再励; 席宁
Source Publication仪器仪表学报
Indexed ByEI ; CSCD
EI Accession number20063910136149
Contribution Rank1
Funding Organization国家863计划(2002AA422210,2003AA404070)资助项目
Keyword原子力显微镜 纳米操作 三维纳米力
Other AbstractDue to the lack of real-time sensory information feedback during atomic force microscope(AFM) based nanomanipulation,the manipulation is performed with low efficiency and less flexibility,and AFM probe is also prone to be broken.To solve this problem,the model of nano forces acting on probe and cantilever deflection was proposed.The real-time three dimensional(3D) nano forces are obtained from cantilever deflections measured by position sensing detector(PSD) using new parameter calibration method.The 3D nano forces are magnified proportionally and sent to a haptic/force device for operator to feel,then the operator can adjust the forces acting on the probe and probe motion trajectory in real time.Thus the efficiency and flexibility of nanomanipulation can be significantly improved and the probe can be protected from being broken. The nanolithography and MWCNT pushing experiments have verified the effectiveness of the system.
Citation statistics
Cited Times:7[CSCD]   [CSCD Record]
Document Type期刊论文
Corresponding Author田孝军
Recommended Citation
GB/T 7714
田孝军,王越超,刘连庆,等. 具有三维力反馈的原子力显微镜纳米操作系统[J]. 仪器仪表学报,2006,27(7):661-665.
APA 田孝军,王越超,刘连庆,焦念东,董再励,&席宁.(2006).具有三维力反馈的原子力显微镜纳米操作系统.仪器仪表学报,27(7),661-665.
MLA 田孝军,et al."具有三维力反馈的原子力显微镜纳米操作系统".仪器仪表学报 27.7(2006):661-665.
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