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Alternative TitleResearch and Implementation of Optimal Motion Control for a Clean-room Robot
Thesis Advisor徐方
Keyword洁净机器人 转动惯量 Pi加前馈参数整定控制 时间最优轨迹规划
Call NumberTP242.3/Y74/2007
Degree Discipline机械电子工程
Degree Name硕士
Degree Grantor中国科学院沈阳自动化研究所
Place of Conferral沈阳
Other AbstractWith the background of the task ‘The Research and Development of 12’’ Wafer Intelligent Manipulator Key Technology and Prototype Machine’,which is sponsored by the very large scale integrated circuit(VLSI) manufacturing equipment project of the Nation ministry of science and technology, the researches on control methods of superstratum performance optimization and substratum time-optimal path planning for a clean-room robot control system are introduced. Based on the formula of atmosphere manipulator inertia using the kinetic energy formula and robot configuration, the simulation show, that the changing extent of the inertia of a atmosphere manipulater is great and the influence of the inertia on the system performance lay store by;Then according to ACPMSM(AC permanent magnet synchronous motor) vector control model, the paper presents a kind of control strategies with position PI closed loop and feed-forward paraneter tuning, the simulation and experiment results show that it can not only restrain the influence of the variant inertia on the system performance efectively, but also be implemented more easily. Aiming at the need of fast motion of clean-room robot,based on the restriction conditions,which is gained from analysing the motion of atmosphere manipulator, the paper presents a kind of time-optimal path planning strategies with changing acceleration, the experiment results show that it have outstanding advantages of time-optimal than path planning with trapezoidal velocity. With the combination of theory and practice, the paper presents a kind of control strategies with restraining the influence of the variant inertia and a kind of time-optimal path planning strategies, which certainly contribute to the development of clean-room robot with perfect performance. In addition, this paper has also studied the parameters identification and PC test algorithmic program, and it is convenient for the further other algorithmic study
Contribution Rank1
Document Type学位论文
Recommended Citation
GB/T 7714
于雷. 洁净机器人的最优运动控制方法研究及实现[D]. 沈阳. 中国科学院沈阳自动化研究所,2007.
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