SIA OpenIR  > 工业信息学研究室  > 工业控制系统研究室
Alternative TitleDesign and Development of Virtual Cluster Tools
Thesis Advisor胡静涛
Keyword半导体集束设备 验证 模拟 Petri网 Vrml
Call NumberTN301/S56/2008
Degree Discipline计算机应用技术
Degree Name硕士
Degree Grantor中国科学院沈阳自动化研究所
Place of Conferral沈阳
Abstract半导体加工设备已进入300mm时代 ,通过一个传输腔体将多个加工单元集成在一起形成的集束型设备成为重要的半导体生产设备。半导体集束设备控制器(CTC)是集束型设备的核心控制系统。CTC通过与集束型设备各组成模块之间通信,监控模块的事件和状态,实时的作出调度决策,控制模块的动作。 CTC是一个复杂的控制软件,为了保证设备工作的正确性,必须对CTC进行严格的测试验证,这是一个长时间、高成本的验证过程。为了减少CTC验证的时间,提高企业生产效率,降低验证成本。本文采用硬件回路模拟器软件验证方法,基于Petri网和VRML建模技术,设计开发了一个用于CTC软件测试验证的虚拟半导体集束设备(VCT)软件。VCT模拟真实的半导体集束设备的工作状态、动作和向CTC反馈的消息,验证CTC工作的正确性。本文首先分析实际半导体集束设备的结构及工作流程,在此基础上设计了用于控制器验证的VCT结构。该结构模块具有可重用性,完成情况表明,该结构满足了验证CTC的要求。通过对真实设备工作流程的分析,本文采用Petri网方法对PM和TM建立了I/O模型。该模型被用于维护虚拟设备的状态,用于对接收到的控制器指令作出对应的响应,同时也被用于判别CTC控制指令的正确性。本文采用VRML建立了虚拟半导体集束设备的三维模型,该模型直观地呈现了硬件设备的动作。在研究了VRML交互方式的基础上,提出了VRML描述的三维模型和CTC实时交互的软件框架结构,实现了三维模型与CTC的实时交互。综合上述研究成果,本文完成了虚拟半导体集束装备软件的设计开发,并实现了预期的功能,可用于半导体集束设备控制器的测试验证,为控制器软件的设计开发提供有力支持。
Other AbstractNowadays, in the consideration of increasing the yield and reducing the cost by reducing the manual to improve cleanliness, reduce productiong time-cycle, semiconductor manufacturing industry increasingly uses integrated tools, that combine several single-wafer processing modules and wafer transports systems such as robots. Such integrated tools is called Cluster Tools. A Cluster Tools Controller (CTC) is a complex supervisory control software system that communicates with the local module controllers (MCs), monitors events and state changes at the component modules, determines the scheduling and control commands in real time, and sends control commands to MCs. A typical verification work requires more than 20 man-months. Futher, testing and verifying a CTC using a real Cluster Tools require consumption of more than several hundreds of wafers, which are very expensive. In this article, a systematic practice for verifying CTC using a Virtual Cluster Tools (VCT) model is proposed, that emulates the operational behavior of a real Cluster Tools with high fidelity. By analysis of the structure of the real semiconductor Cluster Tools, this paper proposes a novel structure of Virtual Cluster Tools for the verification of CTC. In additional, this paper also takes software resusability into consideration. The simulator gets an input of control command signal from CTC, and must give a correct output response for the input command. To achieve this goal, an I/O model is needed for the simulator. By an in-depth analysis of the procedure of VCT, a well designed Petri Nets model of VCT is introduced for the exact purpose. Furthermore, Virtual Reality Modelling Language (VRML) is used to establish a 3D Scene of the VCT for visualization. By using Script Author Interface (SAI) for interacting between 3D Scene and CTC, the 3D Scene can reflect the command issued by CTC real-time. In conclusion, all the work, such asanalysis, design, modeling, realization and simulation, are finished. VCT has been used to verify the development of CTC.
Contribution Rank1
Document Type学位论文
Recommended Citation
GB/T 7714
石泽兴. 虚拟半导体集束设备软件设计与开发[D]. 沈阳. 中国科学院沈阳自动化研究所,2008.
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