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纳米级微动平台的结构力学特性及实验研究
Alternative TitleStructure Mechanics Characteristics and Experiment of the Micro-motion Stage with Nanometer Resolution
丁晓辉; 董再励; 刘柱; 魏阳杰
Department机器人学研究室
Source Publication机器人
ISSN1002-0446
2010
Volume32Issue:3Pages:321-325
Indexed ByEI ; CSCD
EI Accession number20102513030439
CSCD IDCSCD:3943007
Contribution Rank1
Funding Organization国家自然科学基金资助项目(60635040)
Keyword微动平台 结构力学 有限元方法 压电陶瓷驱动器
Abstract为了实现2维非耦合纳米驱动控制,介绍了一种基于压电陶瓷驱动和柔性筋板导向的一体化新型纳米级微动平台的结构设计.重点介绍了运用解析计算方法对平台结构力学特性的分析研究,得出了该平台导向筋板弱截面处的最大应力以及主体机构的基频值,并通过有限元仿真验证了解析计算结果的正确性.最后,采用显微视觉技术,进行了微动平台动态运动性能的测试实验,给出了平台的动态输入输出特性曲线.
Other AbstractIn order to achieve nano-level driving control which is 2-DOF uncoupled,the structure of the nano-level inte-grated micro-motion stage based on oriented slabs and piezoelectric actuators is designed.The structure mechanics charac-teristics of the stage are emphatically studied by analytic calculation.For the stage,the maximum stress of weak section of oriented slab and fundamental frequency of the main-body are obtained.Then the results of analytic calculation are proved by finite element simulation.Finally...
Language中文
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/7235
Collection机器人学研究室
Corresponding Author丁晓辉
Affiliation1.中国科学院沈阳自动化研究所机器人学国家重点实验室
2.中国科学院研究生院
Recommended Citation
GB/T 7714
丁晓辉,董再励,刘柱,等. 纳米级微动平台的结构力学特性及实验研究[J]. 机器人,2010,32(3):321-325.
APA 丁晓辉,董再励,刘柱,&魏阳杰.(2010).纳米级微动平台的结构力学特性及实验研究.机器人,32(3),321-325.
MLA 丁晓辉,et al."纳米级微动平台的结构力学特性及实验研究".机器人 32.3(2010):321-325.
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