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Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors
Fung, C.K.M.; Wong, V.T.S.; Chan, R.H.M.; Li WJ(李文荣)
作者部门机器人学研究室
关键词Ac Electrophoretic Manipulation Carbon Nanotube (Cnt) Cnt Sensors Nano Batch Fabrication Nanomanufacturing
发表期刊IEEE Transactions on Nanotechnology
ISSN1536-125X
2004
卷号3期号:3页码:395- 403
收录类别SCI ; EI ; CPCI(ISTP)
EI收录号2004408394851
WOS记录号WOS:000223725000010
产权排序3
摘要We present a feasible technology for batch assembly of carbon nanotube (CNT) devices by utilizing ac electrophoretic technique to manipulate multiwalled bundles on an Si/SiO2 substrate. Based on this technique, CNTs were successfully and repeatably manipulated between microfabricated electrodes. By using this parallel assembly process, we have investigated the possibility of batch fabricating functional CNT devices when an ac electrical field is applied to an array of microelectrodes that are electrically connected together. Preliminary experimental results showed that over 70% of CNT functional devices can be assembled successfully using our technique, which is considered to be a good yield for nanodevices manufacturing. Besides, the devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼microwatts) with electronic circuit response of approximately 100 kHz in constant current mode operation. In this paper, we will present the fabrication process of this feasible batch manufacturable method for functional CNT-based thermal sensors, which will dramatically reduce production costs and production time of nanosensing devices and potentially enable fully automated assembly of CNT-based devices. Experimental results from the thermal sensors fabricated by this batch process will also be discussed.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]SHEAR-STRESS SENSOR ; ELECTRICAL-CONDUCTIVITY ; AC ELECTROPHORESIS ; CONTACT RESISTANCE ; OHMIC CONTACTS ; PURIFICATION ; ORIENTATION ; PLACEMENT ; ARRAYS ; METAL
WOS研究方向Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
引用统计
被引频次:75[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/7345
专题机器人学研究室
通讯作者Fung, C.K.M.
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Shatin, Hong Kong
2.Department of Mechanical Engineering, Univ. of California at Los Angeles, Los Angeles, CA 90095, United States
3.Shenyang Institute of Automation, Shenyang 110016, China
推荐引用方式
GB/T 7714
Fung, C.K.M.,Wong, V.T.S.,Chan, R.H.M.,et al. Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors[J]. IEEE Transactions on Nanotechnology,2004,3(3):395- 403.
APA Fung, C.K.M.,Wong, V.T.S.,Chan, R.H.M.,&Li WJ.(2004).Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors.IEEE Transactions on Nanotechnology,3(3),395- 403.
MLA Fung, C.K.M.,et al."Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors".IEEE Transactions on Nanotechnology 3.3(2004):395- 403.
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