| Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement | |
Winnie W. Y. Chow; Qu YL(曲艳丽) ; Li WJ(李文荣); Steve C. H. Tung
| |
| Department | 机器人学研究室 |
| Source Publication | Microfluidics and Nanofluidics
 |
| ISSN | 1613-4982 |
| 2010 | |
| Volume | 8Issue:5Pages:631-640 |
| Indexed By | SCI ; EI |
| EI Accession number | 20102913088029 |
| WOS ID | WOS:000276474300007 |
| Contribution Rank | 2 |
| Keyword | Carbon Nanotubes Cnt Sensors Micro-flow Sensor Micro Shear-stress Sensor |
| Abstract | We have developed SWCNT sensors for air-flow shear-stress measurement inside a polymethylmethacrylate (PMMA) “micro-wind tunnel” chip. An array of sensors is fabricated by using dielectrophoretic (DEP) technique to manipulate bundled single-walled carbon nanotubes (SWCNTs) across the gold microelectrodes on a PMMA substrate. The sensors are then integrated in a PMMA micro-wind tunnel, which is fabricated by SU-8 molding/hot-embossing technique. Since the sensors detect air flow by thermal transfer principle, we have first examined the I–V characteristics of the sensors and confirmed that self-heating effect occurs when the input voltage is above ~1 V. We then performed the flow sensing experiment on the sensors using constant temperature (CT) configuration with input power of ~230 μW. The voltage output of the sensors increases with the increasing flow rate in the micro-wind tunnel and the detectable volumetric flow is in the order of 1 × 10−5m3/s. We also found that the activation power of the sensors has a linear relation with 1/3 exponential power of the shear stress which is similar to conventional hot-wire and polysilicon types of convection-based shear-stress sensors. Moreover, measurements of sensors with different overheat ratios were compared, and results showed that sensor is more sensitive to the flow with a higher overheat ratio. |
| Language | 英语 |
| WOS Headings | Science & Technology ; Technology ; Physical Sciences |
| WOS Subject | Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas |
| WOS Research Area | Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.sia.cn/handle/173321/7368 |
| Collection | 机器人学研究室 |
| Affiliation | 1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, CUHK, William M. W. Mong Engineering Building, Shatin, NT, China 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, 114 Nanta Street, Shenyang, China 3.Department of Mechanical Engineering, University of Arkansas, 204 Mechanical Engineering, Dickson Street, Fayetteville, AR72701, United States |
| Recommended Citation GB/T 7714 | Winnie W. Y. Chow,Qu YL,Li WJ,et al. Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement[J]. Microfluidics and Nanofluidics,2010,8(5):631-640. |
| APA | Winnie W. Y. Chow,Qu YL,Li WJ,&Steve C. H. Tung.(2010).Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement.Microfluidics and Nanofluidics,8(5),631-640. |
| MLA | Winnie W. Y. Chow,et al."Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement".Microfluidics and Nanofluidics 8.5(2010):631-640. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| YWQK000177.pdf（545KB） | 期刊论文 | 出版稿 | 开放获取 | ODC PDDL | View Application Full Text | |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment