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Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement
Winnie W. Y. Chow; Qu YL(曲艳丽); Li WJ(李文荣); Steve C. H. Tung
Department机器人学研究室
Source PublicationMicrofluidics and Nanofluidics
ISSN1613-4982
2010
Volume8Issue:5Pages:631-640
Indexed BySCI ; EI
EI Accession number20102913088029
WOS IDWOS:000276474300007
Contribution Rank2
KeywordCarbon Nanotubes Cnt Sensors Micro-flow Sensor Micro Shear-stress Sensor
AbstractWe have developed SWCNT sensors for air-flow shear-stress measurement inside a polymethylmethacrylate (PMMA) “micro-wind tunnel” chip. An array of sensors is fabricated by using dielectrophoretic (DEP) technique to manipulate bundled single-walled carbon nanotubes (SWCNTs) across the gold microelectrodes on a PMMA substrate. The sensors are then integrated in a PMMA micro-wind tunnel, which is fabricated by SU-8 molding/hot-embossing technique. Since the sensors detect air flow by thermal transfer principle, we have first examined the I–V characteristics of the sensors and confirmed that self-heating effect occurs when the input voltage is above ~1 V. We then performed the flow sensing experiment on the sensors using constant temperature (CT) configuration with input power of ~230 μW. The voltage output of the sensors increases with the increasing flow rate in the micro-wind tunnel and the detectable volumetric flow is in the order of 1 × 10−5m3/s. We also found that the activation power of the sensors has a linear relation with 1/3 exponential power of the shear stress which is similar to conventional hot-wire and polysilicon types of convection-based shear-stress sensors. Moreover, measurements of sensors with different overheat ratios were compared, and results showed that sensor is more sensitive to the flow with a higher overheat ratio.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectNanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas
WOS Research AreaScience & Technology - Other Topics ; Instruments & Instrumentation ; Physics
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/7368
Collection机器人学研究室
Affiliation1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, CUHK, William M. W. Mong Engineering Building, Shatin, NT, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, 114 Nanta Street, Shenyang, China
3.Department of Mechanical Engineering, University of Arkansas, 204 Mechanical Engineering, Dickson Street, Fayetteville, AR72701, United States
Recommended Citation
GB/T 7714
Winnie W. Y. Chow,Qu YL,Li WJ,et al. Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement[J]. Microfluidics and Nanofluidics,2010,8(5):631-640.
APA Winnie W. Y. Chow,Qu YL,Li WJ,&Steve C. H. Tung.(2010).Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement.Microfluidics and Nanofluidics,8(5),631-640.
MLA Winnie W. Y. Chow,et al."Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement".Microfluidics and Nanofluidics 8.5(2010):631-640.
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