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Planning and control of 3-D nano-manipulation
Li Guangyong; Xi N(席宁); Wang YC(王越超); Yu Mengmeng; Fung Wai-Keung
Department机器人学研究室
Source PublicationActa Mechanica Sinica
ISSN0567-7718
2004
Volume20Issue:2Pages:117-124
Indexed BySCI ; EI ; CPCI(ISTP) ; CSCD
EI Accession number2004318296341
WOS IDWOS:000221518600002
CSCD IDCSCD:1846991
Contribution Rank2
KeywordAfm Nano-manipulation
Abstract

The use of atomic force microscope (AFM) as a nanomanipulator has been evolving for various kinds of nano-manipulation tasks. Due to the bow effect of the piezo scanner of the AFM, the AFM space is different from the Cartesian space. Traditional nanomanipulation based on AFM is only a 2-D operation and does not consider the bow effect of the piezotube. In this paper, different 3-D nanomanipulation tasks using AFM such as nanolithography, pushing and cutting have been discussed. 3-D path planning is performed directly in the AFM space and the 3-D paths are generated based on the 3-D topography information of the surface represented in the AFM space. This approach can avoid the mappings between the AFM space and Cartesian space in planning. By following the generated motion paths, the tip can either follow the topography of the surface or move across the surface by avoiding collision with bumps. Nanomanipulation using this method can be considered as the “true” 3-D operations since the cantilever tip can be controlled to follow any desired 3-D trajectory within the range of AFM space. The experimental study shows the effectiveness of the planning and control scheme.

Language英语
WOS HeadingsScience & Technology ; Technology
WOS SubjectEngineering, Mechanical ; Mechanics
WOS KeywordAtomic-force Microscope ; Nanometer-scale ; Carbon Nanotubes ; Nanoparticles
WOS Research AreaEngineering ; Mechanics
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/7391
Collection机器人学研究室
Affiliation1.Department of Electrical and Computer Engineering, Michigan State University
2.Shenyang Institute of Automation, Chinese Academy of Sciences
3.Department of Electrical Engineering, Princeton University
4.Department of Automation and Computer-Aided Engineering, The Chinese University of Hong Kong
Recommended Citation
GB/T 7714
Li Guangyong,Xi N,Wang YC,et al. Planning and control of 3-D nano-manipulation[J]. Acta Mechanica Sinica,2004,20(2):117-124.
APA Li Guangyong,Xi N,Wang YC,Yu Mengmeng,&Fung Wai-Keung.(2004).Planning and control of 3-D nano-manipulation.Acta Mechanica Sinica,20(2),117-124.
MLA Li Guangyong,et al."Planning and control of 3-D nano-manipulation".Acta Mechanica Sinica 20.2(2004):117-124.
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