SIA OpenIR  > 机器人学研究室
Planning and control of 3-D nano-manipulation
Li Guangyong; Xi N(席宁); Wang YC(王越超); Yu Mengmeng; Fung Wai-Keung
Source PublicationActa Mechanica Sinica
Indexed BySCI ; EI ; CPCI(ISTP) ; CSCD
EI Accession number2004318296341
WOS IDWOS:000221518600002
Contribution Rank2
KeywordAfm Nano-manipulation

The use of atomic force microscope (AFM) as a nanomanipulator has been evolving for various kinds of nano-manipulation tasks. Due to the bow effect of the piezo scanner of the AFM, the AFM space is different from the Cartesian space. Traditional nanomanipulation based on AFM is only a 2-D operation and does not consider the bow effect of the piezotube. In this paper, different 3-D nanomanipulation tasks using AFM such as nanolithography, pushing and cutting have been discussed. 3-D path planning is performed directly in the AFM space and the 3-D paths are generated based on the 3-D topography information of the surface represented in the AFM space. This approach can avoid the mappings between the AFM space and Cartesian space in planning. By following the generated motion paths, the tip can either follow the topography of the surface or move across the surface by avoiding collision with bumps. Nanomanipulation using this method can be considered as the “true” 3-D operations since the cantilever tip can be controlled to follow any desired 3-D trajectory within the range of AFM space. The experimental study shows the effectiveness of the planning and control scheme.

WOS HeadingsScience & Technology ; Technology
WOS SubjectEngineering, Mechanical ; Mechanics
WOS KeywordAtomic-force Microscope ; Nanometer-scale ; Carbon Nanotubes ; Nanoparticles
WOS Research AreaEngineering ; Mechanics
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Affiliation1.Department of Electrical and Computer Engineering, Michigan State University
2.Shenyang Institute of Automation, Chinese Academy of Sciences
3.Department of Electrical Engineering, Princeton University
4.Department of Automation and Computer-Aided Engineering, The Chinese University of Hong Kong
Recommended Citation
GB/T 7714
Li Guangyong,Xi N,Wang YC,et al. Planning and control of 3-D nano-manipulation[J]. Acta Mechanica Sinica,2004,20(2):117-124.
APA Li Guangyong,Xi N,Wang YC,Yu Mengmeng,&Fung Wai-Keung.(2004).Planning and control of 3-D nano-manipulation.Acta Mechanica Sinica,20(2),117-124.
MLA Li Guangyong,et al."Planning and control of 3-D nano-manipulation".Acta Mechanica Sinica 20.2(2004):117-124.
Files in This Item: Download All
File Name/Size DocType Version Access License
YWQK000232.pdf(1304KB)期刊论文出版稿开放获取ODC PDDLView Download
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Li Guangyong]'s Articles
[Xi N(席宁)]'s Articles
[Wang YC(王越超)]'s Articles
Baidu academic
Similar articles in Baidu academic
[Li Guangyong]'s Articles
[Xi N(席宁)]'s Articles
[Wang YC(王越超)]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Li Guangyong]'s Articles
[Xi N(席宁)]'s Articles
[Wang YC(王越超)]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: YWQK000232.pdf
Format: Adobe PDF
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.