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Polymer MEMS actuators for underwater micromanipulation
J.W.L. Zhou; Ho-Yin Chan; T.K.H. To; K.W.C. Lai; Li WJ(李文荣)
Department机器人学研究室
Source PublicationIEEE/ASME Transactions on Mechatronics
ISSN1083-4435
2004
Volume9Issue:2Pages:334-342
Indexed BySCI ; EI
EI Accession number2004338307909
WOS IDWOS:000222256500004
Contribution Rank3
Abstract

Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.

Language英语
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Cited Times:84[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/7393
Collection机器人学研究室
Affiliation1.Ctr. for Micro and Nano Syst., The Chinese University of Hong Kong, Shatin, Hong Kong
2.Micro and Nano Automation Lab., Shenyang Institute of Automation, Chinese Acad. of Sci., Shenyang, Liaoning, China
Recommended Citation
GB/T 7714
J.W.L. Zhou,Ho-Yin Chan,T.K.H. To,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE/ASME Transactions on Mechatronics,2004,9(2):334-342.
APA J.W.L. Zhou,Ho-Yin Chan,T.K.H. To,K.W.C. Lai,&Li WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE/ASME Transactions on Mechatronics,9(2),334-342.
MLA J.W.L. Zhou,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE/ASME Transactions on Mechatronics 9.2(2004):334-342.
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