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Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems
Qu YL(曲艳丽); Chow, W.W.Y.; Mengxing Ouyang; Tung, S.C.H.; Li WJ(李文荣); Xuliang Han
Department机器人学研究室
Source PublicationIEEE Transactions on Nanotechnology
ISSN1536-125X
2008
Volume7Issue:5Pages:565-572
Indexed BySCI ; EI
EI Accession number20084211639743
WOS IDWOS:000260463300007
Contribution Rank1
KeywordAqueous Shear Stress Sensors Carbon Nanotubes (Cnt) Cnt Sensors Microfluidic System Ultra-low-powered Sensors
AbstractNovel aqueous shear stress sensors based on bulk carbon nanotubes (CNTs) were developed by utilizing microelectrical mechanical system (MEMS) compatible fabrication technology. The sensors were fabricated on glass substrates by batch assembling electronics-grade CNTs (EG-CNTs) as sensing elements between microelectrode pairs using dielectrophoretic technique. Then, the CNT sensors were permanently integrated in glass-polydimethylsiloxane (PDMS) microfluidic channels by using standard glass-PDMS bonding process. Upon exposure to deionized (DI) water flow in the microchannel, the characteristics of the CNT sensors were investigated at room temperature under constant current (CC) mode. The specific electrical responses of the CNT sensors at different currents have been measured. It was found that the electrical resistance of the CNT sensors increased noticeably in response to the introduction of fluid shear stress when low activation current (Lt1 mA) was used, and unexpectedly decreased when the current exceeded 5 mA. We have shown that the sensor could be activated using input currents as low as 100 muA to measure the flow shear stress. The experimental results showed that the output resistance change could be plotted as a linear function of the shear stress to the one-third power. This result proved that the EG-CNT sensors can be operated as conventional thermal flow sensors but only require ultra-low activation power ( ~ 1 muW), which is ~ 1000 times lower than the conventional MEMS thermal flow sensors.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS KeywordCARBON NANOTUBES
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
Citation statistics
Cited Times:16[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/7419
Collection机器人学研究室
Affiliation1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
3.Mechanical and Automation Engineering Department, Chinese University of Hong Kong, Hong Kong, Hong Kong
4.Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, United States
5.Brewer Science, Inc., Rolla, MO 65401, United States
Recommended Citation
GB/T 7714
Qu YL,Chow, W.W.Y.,Mengxing Ouyang,et al. Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems[J]. IEEE Transactions on Nanotechnology,2008,7(5):565-572.
APA Qu YL,Chow, W.W.Y.,Mengxing Ouyang,Tung, S.C.H.,Li WJ,&Xuliang Han.(2008).Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems.IEEE Transactions on Nanotechnology,7(5),565-572.
MLA Qu YL,et al."Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems".IEEE Transactions on Nanotechnology 7.5(2008):565-572.
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