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题名:
Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems
作者: Qu YL(曲艳丽); Chow, W.W.Y.; Mengxing Ouyang; Tung, S.C.H.; Li WJ(李文荣); Xuliang Han
作者部门: 机器人学研究室
关键词: Aqueous shear stress sensors ; carbon nanotubes (CNT) ; CNT sensors ; microfluidic system ; ultra-low-powered sensors
刊名: IEEE Transactions on Nanotechnology
ISSN号: 1536-125X
出版日期: 2008
卷号: 7, 期号:5, 页码:565-572
收录类别: SCI ; EI
EI收录号: 20084211639743
WOS记录号: WOS:000260463300007
产权排序: 1
摘要: Novel aqueous shear stress sensors based on bulk carbon nanotubes (CNTs) were developed by utilizing microelectrical mechanical system (MEMS) compatible fabrication technology. The sensors were fabricated on glass substrates by batch assembling electronics-grade CNTs (EG-CNTs) as sensing elements between microelectrode pairs using dielectrophoretic technique. Then, the CNT sensors were permanently integrated in glass-polydimethylsiloxane (PDMS) microfluidic channels by using standard glass-PDMS bonding process. Upon exposure to deionized (DI) water flow in the microchannel, the characteristics of the CNT sensors were investigated at room temperature under constant current (CC) mode. The specific electrical responses of the CNT sensors at different currents have been measured. It was found that the electrical resistance of the CNT sensors increased noticeably in response to the introduction of fluid shear stress when low activation current (Lt1 mA) was used, and unexpectedly decreased when the current exceeded 5 mA. We have shown that the sensor could be activated using input currents as low as 100 muA to measure the flow shear stress. The experimental results showed that the output resistance change could be plotted as a linear function of the shear stress to the one-third power. This result proved that the EG-CNT sensors can be operated as conventional thermal flow sensors but only require ultra-low activation power ( ~ 1 muW), which is ~ 1000 times lower than the conventional MEMS thermal flow sensors.
语种: 英语
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]: CARBON NANOTUBES
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/7419
Appears in Collections:机器人学研究室_期刊论文

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作者单位: 1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
3.Mechanical and Automation Engineering Department, Chinese University of Hong Kong, Hong Kong, Hong Kong
4.Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, United States
5.Brewer Science, Inc., Rolla, MO 65401, United States

Recommended Citation:
Qu YL,Chow, W.W.Y.,Mengxing Ouyang,et al. Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems[J]. IEEE Transactions on Nanotechnology,2008,7(5):565-572.
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