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Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems
Qu YL(曲艳丽); Chow, W.W.Y.; Mengxing Ouyang; Tung, S.C.H.; Li WJ(李文荣); Xuliang Han
作者部门机器人学研究室
关键词Aqueous Shear Stress Sensors Carbon Nanotubes (Cnt) Cnt Sensors Microfluidic System Ultra-low-powered Sensors
发表期刊IEEE Transactions on Nanotechnology
ISSN1536-125X
2008
卷号7期号:5页码:565-572
收录类别SCI ; EI
EI收录号20084211639743
WOS记录号WOS:000260463300007
产权排序1
摘要Novel aqueous shear stress sensors based on bulk carbon nanotubes (CNTs) were developed by utilizing microelectrical mechanical system (MEMS) compatible fabrication technology. The sensors were fabricated on glass substrates by batch assembling electronics-grade CNTs (EG-CNTs) as sensing elements between microelectrode pairs using dielectrophoretic technique. Then, the CNT sensors were permanently integrated in glass-polydimethylsiloxane (PDMS) microfluidic channels by using standard glass-PDMS bonding process. Upon exposure to deionized (DI) water flow in the microchannel, the characteristics of the CNT sensors were investigated at room temperature under constant current (CC) mode. The specific electrical responses of the CNT sensors at different currents have been measured. It was found that the electrical resistance of the CNT sensors increased noticeably in response to the introduction of fluid shear stress when low activation current (Lt1 mA) was used, and unexpectedly decreased when the current exceeded 5 mA. We have shown that the sensor could be activated using input currents as low as 100 muA to measure the flow shear stress. The experimental results showed that the output resistance change could be plotted as a linear function of the shear stress to the one-third power. This result proved that the EG-CNT sensors can be operated as conventional thermal flow sensors but only require ultra-low activation power ( ~ 1 muW), which is ~ 1000 times lower than the conventional MEMS thermal flow sensors.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]CARBON NANOTUBES
WOS研究方向Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
引用统计
被引频次:14[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/7419
专题机器人学研究室
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
3.Mechanical and Automation Engineering Department, Chinese University of Hong Kong, Hong Kong, Hong Kong
4.Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, United States
5.Brewer Science, Inc., Rolla, MO 65401, United States
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Qu YL,Chow, W.W.Y.,Mengxing Ouyang,et al. Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems[J]. IEEE Transactions on Nanotechnology,2008,7(5):565-572.
APA Qu YL,Chow, W.W.Y.,Mengxing Ouyang,Tung, S.C.H.,Li WJ,&Xuliang Han.(2008).Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems.IEEE Transactions on Nanotechnology,7(5),565-572.
MLA Qu YL,et al."Ultra-Low-Powered Aqueous Shear Stress Sensors Based on Bulk EG-CNTs Integrated in Microfluidic Systems".IEEE Transactions on Nanotechnology 7.5(2008):565-572.
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