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IC装备控制系统平台技术研究
Alternative TitleResearch of Control System Platform Technology for IC Equipment
刘明哲; 徐皑冬; 于海斌; 王宏
Department工业控制系统研究室
Conference Name7th World Congress on Intelligent Control and Automation
Conference DateJune 25-27, 2008
Conference PlaceChongqing, China
Author of SourceChongqing Univ, Chongqing Inst Technol, Chongqing Univ Sci & Technol, Xihua Univ, SW Univ Sci & Technol, IEEE Robot & Automat Soc, IEEE Control Syst Soc, Beijing Chapter, Chinese Assoc Automat, Chinese Assoc Artificial Intell, Natl Nat Sci Fdn, Chongqing Municipal Sci & Technol Comm, Chongqing Municipal Assoc Sci & Technol, KC Wong Educ Fdn
Source Publication2008 7TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION, VOLS 1-23
PublisherIEEE
Publication PlaceNEW YORK
2008
Pages7393-7397
Indexed ByEI ; CPCI(ISTP)
EI Accession number20083911600492
WOS IDWOS:000259965706007
Contribution Rank1
ISBN978-1-4244-2113-8
Keyword集成电路 控制系统 半导体 Semi标准
Abstract半导体集成电路的生产制造向300mm晶圆的方向发展,IC装备控制系统不但要完成设备自身的任务调度、物料传输、工艺控制,还要考虑企业级的信息集成、生产调度和行业标准。本文分析了半导体制造流程和控制需求,提出了一种框架式、模块化的IC 装备控制系统平台模型,旨在完成系统的控制功能的同时,使得半导体设备的控制具有更大的灵活性、伸缩性、企业级交互能力,并符合行业标准。
Other AbstractWith the development of road to 300mm semiconductor wafer manufacturing, IC equipment control system not only implement its task scheduling, material transfer and process control, we must also consider the enterprise information integration, production scheduling and industry standards. This paper analyzes the semiconductor manufacturing process, control requirements, and presents a framework-style, modular IC equipment control system platform model, aimed at the complete system control functions at the same time, making the control of the semiconductor equipment greater flexibility, scalability, enterprise-class interactive capabilities, and in accordance with industry standards.
Language中文
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/8093
Collection工业信息学研究室_工业控制系统研究室
Corresponding Author刘明哲
AffiliationShenyang Institute of Automation, Chinese Academy of Science, Shenyang 110016, China
Recommended Citation
GB/T 7714
刘明哲,徐皑冬,于海斌,等. IC装备控制系统平台技术研究[C]//Chongqing Univ, Chongqing Inst Technol, Chongqing Univ Sci & Technol, Xihua Univ, SW Univ Sci & Technol, IEEE Robot & Automat Soc, IEEE Control Syst Soc, Beijing Chapter, Chinese Assoc Automat, Chinese Assoc Artificial Intell, Natl Nat Sci Fdn, Chongqing Municipal Sci & Technol Comm, Chongqing Municipal Assoc Sci & Technol, KC Wong Educ Fdn. NEW YORK:IEEE,2008:7393-7397.
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