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Research on a simulation platform assisting analysis of the cluster tool
Zheng XH(郑秀红); Hu JT(胡静涛); Yu HB(于海斌)
Department工业信息学研究室
Conference Name2011 3rd International Conference on Computer Research and Development, ICCRD 2011
Conference DateMarch 11-15, 2011
Conference PlaceShanghai, China
Source PublicationICCRD2011 - 2011 3rd International Conference on Computer Research and Development
PublisherIEEE Computer Society
Publication PlacePiscataway, NJ, USA
2011
Pages249-253
Indexed ByEI
EI Accession number20112214016120
Contribution Rank1
ISBN978-1-61284-837-2
KeywordComputer Simulation Research
AbstractTo predict the throughput of the cluster tool and simulate the system operation process, the paper develops a simulation platform, named as ClusterSim. ClusterSim provides the easy-to-use interface to accept user's input about the cluster tool configuration. The results that ClusterSim runs include the wafer foundation period, the lot period, chamber utilization, and others. The output of ClusterSim is verified using Perkinson's model. The result indicates this platform is valid. ClusterSim provides an effective tool for users to analyze the cluster tool performance and validate feasibility of some routine recipe.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/8393
Collection工业信息学研究室
Corresponding AuthorZheng XH(郑秀红)
Affiliation1.Key Laboratory of Industrial Informatics, Shenyang Institute of Automation, CAS, Shenyang 110016, China
2.Graduate School, Chinese Academy of Sciences, CAS, Beijing 100039, China
3.School of Computer Science and Technology, Shenyang University of Chemical Technology, Shenyang, 110142, China
Recommended Citation
GB/T 7714
Zheng XH,Hu JT,Yu HB. Research on a simulation platform assisting analysis of the cluster tool[C]. Piscataway, NJ, USA:IEEE Computer Society,2011:249-253.
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