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题名:
3D nano forces sensing for an AFM based nanomanipulator
作者: Tian XJ(田孝军); Liu LQ(刘连庆); Jiao ND(焦念东); Wang YC(王越超); Dong ZL(董再励); Xi N(席宁)
作者部门: 机器人学研究室
会议名称: International Conference on Information Acquistition
会议日期: June 21-25, 2004
会议地点: Hefei, China
会议主办者: Int Assoc Informat Acquisit, Int Journal Informat Acquisit, IEEE Robot & Automat Soc, Natl Nat Sci Fdn China, Inst Intelligent Mach, Univ Sci & Technol China
会议录: ICIA 2004: Proceedings of 2004 International Conference on Information Acquisition
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2004
页码: 208-212
收录类别: EI ; CPCI(ISTP)
ISBN号: 0-7803-8629-9
关键词: AFM based nanomanipulator ; 3D nano forces modeling ; parameters calibration
摘要: Atomic Force Microscope (AFM) has been proven to be a useful tool to characterize and change the sample surface down to the nanometer scale. However, in the AFM based nano manipulation, the main problem is the lack of real-time sensory feedback for a user, which makes the manipulation almost in the dark and inefficient. In this paper, the AFM probe micro cantilever-tip is used not only as an end effector but also as a three dimensional (3D) nano forces sensor for measuring the interactive forces between the AFM probe tip and the object or substrate in nanomanipulation. The nano forces acting on cantilever-tip is modeled and the real-time PSD signals are used to calculate the forces. With new parameters calibration method used, the real 3D nano forces can be easily got and then fed to a haptic/force device for operator to feel, thus real-time manipulation forces information is obtained, with which the efficiency of nanomanipulation can be significantly improved. Nano-imprint experiments verify the effectiveness of 3D forces sensing system and efficiency improvement of nano manipulation using this system.
语种: 英语
产权排序: 1
EI收录号: 2005289207262
WOS记录号: WOS:000228481300049
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8458
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
Tian XJ,Liu LQ,Jiao ND,et al. 3D nano forces sensing for an AFM based nanomanipulator[C]. International Conference on Information Acquistition. Hefei, China. June 21-25, 2004.3D nano forces sensing for an AFM based nanomanipulator.
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