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题名: AFM Operating-Drift Detection and Analyses based on Automated Sequential Image Processing
作者: Zhan ZK(詹志坤) ; Yang YL(杨永良) ; Li WR(李文荣) ; Dong ZL(董再励) ; Qu YL(曲艳丽) ; Wang YC(王越超) ; Zhou L(周磊)
作者部门: 机器人学研究室
会议名称: 7th IEEE Conference on Nanotechnology
会议日期: August 2-5, 2007
会议地点: Hong Kong, China
会议主办者: IEEE, IEEE Nanotechnol Council, IEEE Electron Devices Soc, Chinese Univ Hong Kong, Ctr Micro & Nano Syst, ETH, Inst Robot & Intelligent Syst, GETI, KC Wong Educ Fdn, US Army Int Technol Ctr, ACS NANO, CRC Press, Taylor & Francis Grp, intel
会议录: 2007 7TH IEEE CONFERENCE ON NANOTECHNOLOGY, VOL 1-3
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2007
页码: 752-757
收录类别: CPCI(ISTP) ; EI
ISBN号: 978-1-4244-0607-4
关键词: Atomic Force Microscopes (AFM) ; automatic nanomanipulation ; automated sequential image processing ; manipulation drift
摘要: Nanomanipulation and nanoimaging with Atomic Force Microscopes (AFM) is a popular technique for nano-manufacturing. However, under ambient conditions without stringent environment control, nanomanipulation tasks are difficult to complete because various system drift can cause uncertainties of the spatial relationship between the AFM probe tip and the nano-entities to be manipulated. Researchers have speculated that thermal drift is one of the major causes of errors for nanomanipulation using AFM systems, but to this date, quantitative analyses of AFM drift phenomenon are almost non-existent. This paper gives a detection and analyses method for AFM operating-drift based on automated sequential image processing, which provides a quantitative understanding of the AFM drift phenomenon. Essentially, the drift of an AFM system can be measured by a Phase-Correlation Method among consecutively scanned images. In order to eliminate the effects of z-direction drifts in x, y displacements, a gradient calculation method is introduced. The influence of a PZT actuator's thermal expansion on overall system drift is also analyzed. The results showed that although the length of the PZT actuator's expansion is the greatest among all the main system components, it may not be the main cause of the overall system drift.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8549
Appears in Collections:机器人学研究室_会议论文

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詹志坤; 杨永良; 李文荣; 董再励; 曲艳丽; 王越超; 周磊.AFM Operating-Drift Detection and Analyses based on Automated Sequential Image Processing.见:IEEE .2007 7TH IEEE CONFERENCE ON NANOTECHNOLOGY, VOL 1-3,NEW YORK,2007,752-757
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