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AFM tip on-line positioning by using the landmark in nano-manipulation
Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励); Wang ZY(王智宇)
作者部门机器人学研究室
会议名称2010 4th IEEE Nanotechnology Materials and Devices Conference, NMDC2010
会议日期October 12-15, 2010
会议地点Monterey, CA, United states
会议主办者IEEE Nanotechnology Council; Michigan State University
会议录名称2010 IEEE Nanotechnology Materials and Devices Conference, NMDC2010
出版者IEEE Computer Society
出版地Piscataway, NJ
2010
页码75-80
收录类别EI
EI收录号20110313602373
产权排序1
ISBN号978-1-4244-8896-4
关键词Nanoprobes Nanotechnology
摘要AFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined with the Kalman filter based localization algorithm is proposed to improve the accuracy of the tip positioning in the task space coordinate frame. A motion model based on the Prandtl-Ishlinskii (PI) model is established, the distribution of model error is statistically obtained through the experimental calibration process. In addition, to further reduce the tip position uncertainties, an environment measurement models is developed through sensing the landmark intermittently with local scanning method during manipulation. Both the simulations results and experimental results are presented to demonstrate the validity of the proposed method. 
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/8550
专题机器人学研究室
通讯作者Yuan S(袁帅)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China
2.Graduate University of the Chinese Academy of Sciences, Beijing, 100039, China
3.Dept. of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan
4.Dept. of Electrical and Computer Engineering, Michigan State University, United States
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GB/T 7714
Yuan S,Liu LQ,Wang ZD,et al. AFM tip on-line positioning by using the landmark in nano-manipulation[C]//IEEE Nanotechnology Council; Michigan State University. Piscataway, NJ:IEEE Computer Society,2010:75-80.
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