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题名:
AFM tip on-line positioning by using the landmark in nano-manipulation
作者: Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励); Wang ZY(王智宇)
作者部门: 机器人学研究室
通讯作者: Yuan S(袁帅)
会议名称: 2010 4th IEEE Nanotechnology Materials and Devices Conference, NMDC2010
会议日期: October 12-15, 2010
会议地点: Monterey, CA, United states
会议主办者: IEEE Nanotechnology Council; Michigan State University
会议录: 2010 IEEE Nanotechnology Materials and Devices Conference, NMDC2010
会议录出版者: IEEE Computer Society
会议录出版地: Piscataway, NJ
出版日期: 2010
页码: 75-80
收录类别: EI
EI收录号: 20110313602373
产权排序: 1
ISBN号: 978-1-4244-8896-4
关键词: Nanoprobes ; Nanotechnology
摘要: AFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined with the Kalman filter based localization algorithm is proposed to improve the accuracy of the tip positioning in the task space coordinate frame. A motion model based on the Prandtl-Ishlinskii (PI) model is established, the distribution of model error is statistically obtained through the experimental calibration process. In addition, to further reduce the tip position uncertainties, an environment measurement models is developed through sensing the landmark intermittently with local scanning method during manipulation. Both the simulations results and experimental results are presented to demonstrate the validity of the proposed method. 
语种: 英语
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8550
Appears in Collections:机器人学研究室_会议论文

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作者单位: 1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China
2.Graduate University of the Chinese Academy of Sciences, Beijing, 100039, China
3.Dept. of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan
4.Dept. of Electrical and Computer Engineering, Michigan State University, United States

Recommended Citation:
Yuan S,Liu LQ,Wang ZD,et al. AFM tip on-line positioning by using the landmark in nano-manipulation[C]. 2010 4th IEEE Nanotechnology Materials and Devices Conference, NMDC2010. Monterey, CA, United states. October 12-15, 2010.AFM tip on-line positioning by using the landmark in nano-manipulation.
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