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AFM tip on-line positioning by using the landmark in nano-manipulation
Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励); Wang ZY(王智宇)
Conference Name2010 4th IEEE Nanotechnology Materials and Devices Conference, NMDC2010
Conference DateOctober 12-15, 2010
Conference PlaceMonterey, CA, United states
Author of SourceIEEE Nanotechnology Council; Michigan State University
Source Publication2010 IEEE Nanotechnology Materials and Devices Conference, NMDC2010
PublisherIEEE Computer Society
Publication PlacePiscataway, NJ
Indexed ByEI
EI Accession number20110313602373
Contribution Rank1
KeywordNanoprobes Nanotechnology
AbstractAFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined with the Kalman filter based localization algorithm is proposed to improve the accuracy of the tip positioning in the task space coordinate frame. A motion model based on the Prandtl-Ishlinskii (PI) model is established, the distribution of model error is statistically obtained through the experimental calibration process. In addition, to further reduce the tip position uncertainties, an environment measurement models is developed through sensing the landmark intermittently with local scanning method during manipulation. Both the simulations results and experimental results are presented to demonstrate the validity of the proposed method. 
Document Type会议论文
Corresponding AuthorYuan S(袁帅)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China
2.Graduate University of the Chinese Academy of Sciences, Beijing, 100039, China
3.Dept. of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan
4.Dept. of Electrical and Computer Engineering, Michigan State University, United States
Recommended Citation
GB/T 7714
Yuan S,Liu LQ,Wang ZD,et al. AFM tip on-line positioning by using the landmark in nano-manipulation[C]//IEEE Nanotechnology Council; Michigan State University. Piscataway, NJ:IEEE Computer Society,2010:75-80.
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