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题名: An AFM based nanomanipulation system with 3D nano forces feedback
作者: Tian XJ(田孝军) ; Jiao ND(焦念东) ; Liu LQ(刘连庆) ; Wang YC(王越超) ; Dong ZL(董再励) ; Xi N(席宁) ; Li WR(李文荣)
作者部门: 机器人学研究室
会议名称: International Conference on Intelligent Mechatronics and Automation
会议日期: August 26-31, 2004
会议地点: Chengdu, China
会议主办者: Hong Kong Univ Sci & Technol, Kagawa Univ, Univ Electro Commun, Natl Nat Sci Fdn China, Shanghai Univ, Harbin Engn Univ, Japan Soc Precis Engn, IEEE Robot & Automat Soc, IEEE Syst, Man & Cybernet Soc, IEEE Shikoku Sect, Chinese Inst Elect, Chinese Soc Mech Engn, China Cleaning Engn Technol Cooperat Assoc, Robot Soc Japan, Int Mechatron Forum, JSPE, Tech Comm Intell Mechatron, Minist Educ, China
会议录: PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2004
页码: 18-22
收录类别: CPCI(ISTP) ; EI
ISBN号: 0-7803-8748-1
关键词: nanomanipulation system ; 3D nano forces sensing ; lateral error compensating of probe positioning
摘要: In the AFM based nanomanipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the interactive nano forces between the AFM probe tip and the object or substrate in nanomanipulation. In addition, for a sample-scanning AFM even with a strain gauge position feedback sensor for x-y close-loop displacement control of sample stage, scanning size error will still be generated, which is destructive to lateral positioning accuracy of AFM probe. For improving probe lateral positioning accuracy, an error compensating method is adopted according to system error quantitative analysis based on the authors' previous work. With 3D nano forces sensing through a haptic/force device and probe positioning accuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are presented to verify the effectiveness of the nanomanipulation system.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8556
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
田孝军; 焦念东; 刘连庆; 王越超; 董再励; 席宁; 李文荣.An AFM based nanomanipulation system with 3D nano forces feedback.见:IEEE .PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION ,NEW YORK,2004,18-22
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