中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 机器人学研究室  > 会议论文
题名: Development of AFM based on nano positioning stage
作者: Jiao ND(焦念东) ; Wang YC(王越超) ; Xi N(席宁) ; Dong ZL(董再励)
作者部门: 机器人学研究室
会议名称: IEEE International Conference of Nano/Micro Engineered and Molecular Systems
会议日期: January 16-19, 2007
会议地点: Bangkok, THAILAND
会议主办者: IEEE
会议录: 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2007
页码: 1171-1175
收录类别: CPCI(ISTP) ; EI
ISBN号: 978-1-4244-0609-8
关键词: AFM ; kinematic coupling ; nano positioning stage ; AFM force curve
摘要: A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8660
Appears in Collections:机器人学研究室_会议论文

Files in This Item: Download All
File Name/ File Size Content Type Version Access License
HYQW000480.pdf(5239KB)----开放获取View Download
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Jiao ND(焦念东)]'s Articles
[Wang YC(王越超)]'s Articles
[Xi N(席宁)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Jiao ND(焦念东)]‘s Articles
[Wang YC(王越超)]‘s Articles
[Xi N(席宁)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: HYQW000480.pdf
格式: Adobe PDF
此文件暂不支持浏览
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace