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题名: Displacement measurement of a thermally actuated polymer microrobotic gripper using the optical focus method
作者: Miao L(缪磊) ; Dong ZL(董再励) ; Chan, Hoyin
作者部门: 机器人学研究室
会议名称: 2004 Fifth World Congress on Intelligent Control and Automation (WCICA)
会议日期: June 15-19, 2004
会议地点: Hangzhou, China
会议主办者: IEEE
会议录: Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
会议录出版者: IEEE
会议录出版地: New York
出版日期: 2004
页码: 3800-3804
摘要: With the maturing design of microelectrical mechanism systems, the metrology for MEMS is becoming the hot research in the microsystem technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer microrobotic actuator. Twenty-three under-water images of the microactuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8671
Appears in Collections:机器人学研究室_会议论文

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