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Experimental Investigation on the Dynamic Response of Thermal EG-CNT Flow Sensors
Qu YL(曲艳丽); Dong ZL(董再励); Tung, Steve C. H.; Li WJ(李文荣)
Department机器人学研究室
Conference Name4th IEEE International Conference of Nano/Micro Engineered and Molecular Systems
Conference DateJanuary 5-8, 2009
Conference PlaceShenzhen, China
Author of SourceIEEE
Source Publication2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2
PublisherIEEE
Publication PlaceNEW YORK
2009
Pages813-817
Indexed ByEI ; CPCI(ISTP)
EI Accession number20094212372699
WOS IDWOS:000273161500189
Contribution Rank1
ISBN978-1-4244-4629-2
KeywordAqueous Flow Sensor Carbon Nanotubes Heat Dissipation Ultra-low-power Sensor Thermal Effect
Abstract

Features of the I-V characteristics and the electrical properties of electronics-grade carbon nanotube (EG-CNT) sensors, which were fabricated and integrated in micro fluidic system by combining MEMS-compatible fabrication technology with AC dielectrophoresis technique, were investigated at room temperature to account for significant Joule heating effect under high activation current. The experimental results together with the traditional heat transfer theory indicate that the nonlinearity of the I-V curves and the negative resistance change of the EG-CNT sensors are basically induced and controlled by the thermal effect. In particular, it was found that the lower the original resistance of EG-CNT sensors, the higher the normalized resistance change and lower the sensor's time response. Then, the sensor's capability for aqueous flow detection was exploited upon exposure to DI-water flow in micro fluidic system. The operation power of the sensors was found to be extremely low, i.e., in the range of mu W. Furthermore, higher activation power may degrade the sensor's responsivity.

Language英语
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Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/8698
Collection机器人学研究室
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
3.Department of Mechanical Engineering, University of Arkansas, United States
Recommended Citation
GB/T 7714
Qu YL,Dong ZL,Tung, Steve C. H.,et al. Experimental Investigation on the Dynamic Response of Thermal EG-CNT Flow Sensors[C]//IEEE. NEW YORK:IEEE,2009:813-817.
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