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题名: Feedback control implementation for AFM contact-mode scanner
作者: Zhang WL(张纹霖) ; Miao L(缪磊) ; Zheng YH(郑云辉) ; Dong ZL(董再励) ; Xi N(席宁)
作者部门: 机器人学研究室
会议名称: 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems
会议日期: January 6-9, 2008
会议地点: Sanya, China
会议主办者: IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific
会议录: 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2008
页码: 590-594
收录类别: CPCI(ISTP) ; EI
ISBN号: 978-1-4244-1907-4
关键词: Nano manipulation ; AFM ; hysteresis ; Preisach model
摘要: The atomic force microscope (AFM) has become a standard technique to measure the topography properties of sample surfaces with nanometer resolution. And the AFM tip based Nano manipulation system plays an important role in the field of Nano research. However, nearly all the systems are designed in the commercial AFM machine, in which the software and hardware is not open to perform the Nano manipulation related research. This paper describes a feedback control system implementation for AFM contact-mode scanner, as part of work in building a Nano manipulation system. With PSD sensor and piezoceramic driver, we designed an embedded control system to fulfill the scanning experiments. The imaging results of silicon steps using regular PID feedback control scheme show that the scanning performance is limited by the inherent piezoelectric actuator nonlinear characteristics. In order to achieve better scanning image, we add a Preisach model based feedforward loop into the PID feedback controller to compensate for the hysteresis effect of the piezoceramic actuator, and the performance has been improved moderately. This AFM platform will be used as a testbed for future research work and experiments on AFM scan and manipulation.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8713
Appears in Collections:机器人学研究室_会议论文

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