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题名: Force analysis of top-down forming CNT electrical connection using nanomanipulation robot
作者: Liu LQ(刘连庆) ; Yu P(于鹏) ; Tian XJ(田孝军) ; Wang YC(王越超) ; Dong ZL(董再励) ; Xi N(席宁)
作者部门: 机器人学研究室
会议名称: IEEE International Conference on Mechatronics and Automation
会议日期: June 25-28, 2006
会议地点: Luoyang, China
会议主办者: IEEE Robot & Automat Soc, Shandong Univ, Harbin Engn Univ, Univ Elect Sci & Technol China, IEEE Hong Kong Sect Joint RACS Chapter, Robot Soc Japan, Japan Soc Mech Engineers, Japan Soc Precis Engn, Chinese Univ Hong Kong, Chiba Inst Technol, Kagawa Univ
会议录: IEEE ICMA 2006: Proceeding of the 2006 IEEE International Conference on Mechatronics and Automation, Vols 1-3, Proceedings
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2006
页码: 113-117
收录类别: CPCI(ISTP) ; EI
ISBN号: 1-4244-0465-7
关键词: nanomanipulation ; AFM ; carbon nanotube
摘要: Carbon nanotube (CNT) is an ideal candidate for future nanoelectronics because of its small diameter, high current-carrying capability, and high conductance in a one-dimensional nanoscale channel. The most challenging part in fabricating nanosystems could be the formation of CNT connections. Existing techniques in forming CNT connections are suffered from problems in forming a single CNT connection or not being able to precisely deposit CNTs on specific locations. One of the efficient and reliable ways to form CNT connections is to make connections between CNTs and beforehand-fabricated electrodes by using an atomic force microscopy based nanomanipulation robot, which has the ability to manipulate single CNT with nanometre precision in a controllable manner. But even this, it often happens that CNT cannot be manipulated onto the top surface of electrodes, because there are some restrict conditions among electrode thickness, CNT radius and attitude of AFM tip, this paper will study this problem in detail, some experimental results will be also presented.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8718
Appears in Collections:机器人学研究室_会议论文

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