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题名: The modeling and experiments of a PVDF micro-force sensor
作者: Liu YY(刘意杨) ; Yu P(于鹏) ; Wang YC(王越超) ; Dong ZL(董再励) ; Xi N(席宁)
作者部门: 机器人学研究室
会议名称: 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems
会议日期: January 6-9, 2008
会议地点: Sanya, China
会议主办者: IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific
会议录: 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2008
页码: 56-60
收录类别: CPCI(ISTP) ; EI
ISBN号: 978-1-4244-1907-4
关键词: sensor ; micro-force ; microassembly ; PVDF
摘要: This paper aims at designing a kind of advanced micro-force sensor that can measure force in the range of sub-micro-Newton (mu N). To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micromanipulation, the polyvinylidene fluoride (PVDF) is fabricated highly sensitive force sensors. This paper illustrates the modeling method of a PVDF sensor. The transformation between the micro interactive force and the output of the sensor is described. To calibrate the transformation, the model of the PVDF cantilever beam that shows the relationship between the interactive force and the deflection of the sensor probe tip is bunt first. Then, by given deflection, the interactive force can be calculated with the model. Finally, the transformation can be calibrated. Experiment results verify the effectiveness and accuracy of the transformation model, and the sub-mu N sensitivity of the sensor. This micro force sensing technology will solve an important problem that restricts the development of micromanipulation and batch assembly of micro devices.
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内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8910
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
刘意杨; 于鹏; 王越超; 董再励; 席宁.The modeling and experiments of a PVDF micro-force sensor.见:IEEE .2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3,NEW YORK,2008,60-64
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