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The modeling and experiments of a PVDF micro-force sensor
Liu YY(刘意杨); Yu P(于鹏); Wang YC(王越超); Dong ZL(董再励); Xi N(席宁)
Department机器人学研究室
Conference Name3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems
Conference DateJanuary 6-9, 2008
Conference PlaceSanya, China
Author of SourceIEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific
Source Publication2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
PublisherIEEE
Publication PlaceNEW YORK
2008
Pages60-64
Indexed ByEI ; CPCI(ISTP)
EI Accession number20083611501277
WOS IDWOS:000257066200013
Contribution Rank1
ISBN978-1-4244-1907-4
KeywordSensor Micro-force Microassembly Pvdf
AbstractThis paper aims at designing a kind of advanced micro-force sensor that can measure force in the range of sub-micro-Newton (mu N). To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micromanipulation, the polyvinylidene fluoride (PVDF) is fabricated highly sensitive force sensors. This paper illustrates the modeling method of a PVDF sensor. The transformation between the micro interactive force and the output of the sensor is described. To calibrate the transformation, the model of the PVDF cantilever beam that shows the relationship between the interactive force and the deflection of the sensor probe tip is bunt first. Then, by given deflection, the interactive force can be calculated with the model. Finally, the transformation can be calibrated. Experiment results verify the effectiveness and accuracy of the transformation model, and the sub-mu N sensitivity of the sensor. This micro force sensing technology will solve an important problem that restricts the development of micromanipulation and batch assembly of micro devices.
Language英语
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/8910
Collection机器人学研究室
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning Province, China
2.Graduate School, Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Liu YY,Yu P,Wang YC,et al. The modeling and experiments of a PVDF micro-force sensor[C]//IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific. NEW YORK:IEEE,2008:60-64.
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