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题名: Ultra-low-powered CNTs-based aqueous shear stress sensors integrated in microfluidic channels
作者: Qu YL(曲艳丽) ; Ouyang, Mengxing ; Chow, Winnie W. Y. ; Li WR(李文荣) ; Han, Xuliang
作者部门: 机器人学研究室
会议名称: 3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems
会议日期: January 6-9, 2008
会议地点: Sanya, China
会议主办者: IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific
会议录: 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2008
页码: 718-722
收录类别: CPCI(ISTP) ; EI
ISBN号: 978-1-4244-1907-4
关键词: aqueous shear stress sensors ; carbon nanotubes ; CNT sensors ; microfluidic channels ; ultra-low-power sensors
摘要: We have developed carbon nanotubes (CNTs) based aqueous shear stress sensors integrated in microfluidic channels. The sensors utilized electronics-grade carbon nanotubes (EG-CNTs) as sensing elements, and were built by combining MEMS-compatible fabrication technology with AC dielectrophoretic (DEP) technique. The assembled sensing element has a room-temperature resistance of similar to 100 to 200 Omega by using the original concentration of 1:1 EG-CNTs in DI-water. The I-V measurements of EG-CNTs show the heating effects of the sensors, and the current required to induce the nonlinearity of EG-CNTs is in the order of 100 mu A, which implies the operation power of the sensor is in the range of mu W. Upon exposure to DI-water flow, the characteristics of the sensor have been investigated at room temperature under constant current (CC) activation mode. It was found that the electrical resistance of the CNT sensors increased linearly with the introduction of constant fluidic shear stress. We have tested the response of the sensors with flow velocity from 0.3 to 3.4m/s. The experimental results show that there is a linear relation between the output resistance change and the flow velocity to the one-third power. This result proved that the CNT sensors work with the same principle as conventional MEMS thermal shear stress sensors but only require ultra-low activation power (similar to 1 mu W), which is similar to 1000 times lower than that of conventional MEMS thermal shear stress sensor.
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内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/8938
Appears in Collections:机器人学研究室_会议论文

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