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题名: Atomic Force Microscope-Based Nanorobotic System for Nanoassembly
作者: Liu LQ(刘连庆) ; Xi N(席宁) ; Li GY(李广勇) ; Heping Chen
作者部门: 机器人学研究室
专著(文集)名: Nano Optoelectronic Sensors and Devices: Nanophotonics from Design to Manufacturing
编著者: 席宁 and King Lai
出版者: Elsevier
出版地: Amsterdam, Netherlands
出版日期: 2011
ISBN号: 978-1-4377-3471-3
出处页码: 51-79
摘要: The atomic force microscope (AFM) is a very high-resolution type of Scanning Probe Microscopy (SPM). It was invented by Binnig, Quate and Gerber in 1986 to overcome a basic drawback with Scanning Tunneling Microscopy (STM) that it can only image conducting or semiconducting surfaces. The AFM, however, has the advantage of imaging almost any type of surface, including polymers, ceramics, composites, glass, and biological samples. Since its invention, AFM has attracted tremendous interests from the researchers all over the world in different areas, and soon became one of the foremost microscopy technologies in use today. The resolution of AFM can be down to less than 1 nm both in lateral and vertical directions, which is more than 1000 times better than the optical diffraction limit. The images from AFM can determine roughness, grain size, and features of the sample on nanoscale. It is being used to solve processing and materials problems in a wide range of technologies affecting the electronics, telecommunications, biological, chemical, automotive, aerospace, and energy industries. The materials being investigated include thin and thick film coatings, ceramics, composites, glasses, synthetic and biological membranes, metals, polymers, and semiconductors. The AFM is being applied to studies on phenomena such as abrasion, adhesion, cleaning, corrosion, etching, friction, lubrication, plating, and polishing. In a word, the invention and the wide application of AFM have generated huge impact to all aspects of the scientific research in the world.
产权排序: 1
内容类型: 专著章节/文集论文
URI标识: http://ir.sia.cn/handle/173321/9004
Appears in Collections:机器人学研究室_专著章节/文集论文

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