SIA OpenIR  > 机器人学研究室
纳米微动平台实验系统研究
Alternative TitleResearch on the Micro-mobile Platform Experiment System with Nano Resolution
张江波1,2
Department机器人学研究室
Thesis Advisor王越超
ClassificationTP24
Keyword压电陶瓷 Mems 微机器人 微装配 微操作
Call NumberTP24/Z32/2003
Pages88页
Degree Discipline模式识别与智能系统
Degree Name硕士
2003-07-02
Degree Grantor中国科学院沈阳自动化研究所
Place of Conferral沈阳
Abstract微小型化始终是当代科技发展的重要方向。随着科学技术的发展,在光学、电子、机械制造、机器人、生物、医学等领域对微小型化技术的需求越来越迫切。MEMS(Micro Electro Mechanical System)即微机电系统技术正是在此背景下应运而生,并且迅速地在微机电领域、生物工程领域、医疗科学领域等得到广泛应用。各种微型零件的加工过程往往需要一步到多步的装配,而操作对象的微小化迫切要求进行与之相适应的微操作技术(Micromanipulation Technology)及微机器人的研究。在对压电陶瓷驱动微位移机构的国内外发展现状详细分析的基础上,本文研制出了一种新型四自由度纳米微动平台,并重点对该微动平台的控制系统和驱动电源进行了研究。该移动平台采用一种新的压电陶瓷驱动方式,可以在X、Y、Z、θ四个方向上运动。由于压电陶瓷的特性,使平台具有高精度、高负载能力等特点。本文在总结前人研究成果的基础上,创造性地研制出了用于本实验系统的微动平台控制系统和无线微动平台控制系统。本控制系统不仅仅能用来控制本实验系统中的微动平台,而且还可以作为通用压电陶瓷驱动电源以驱动其他系统中的压电陶瓷驱动器。而且本控制系统具有体积小、无线控制、多达6路输出等特点。经过实验证明,本微动平台实验系统所采用的移动机理是实际可行的。同时也证明了控制系统能够充分满足本微动平台的控制需要。通过本文对微动平台控制系统的研究和实验,为纳米微动平台的进一步研究提供了有效的实验依据,同时也为其他压电陶瓷驱动电源的开发积累了宝贵的经验。该微动平台在微装配、生物微操作等方面有着广阔的应用前景。
Other AbstractMicrominiaturization always is the direction to be developed for the science and technology of the time. With the developing of science and technology, the need of microminiaturization is more and more urgent in many technical fields, such as optical, electrical, mechanical manufacturing, robotics, biological and medical. MEMS (Micro Electro Mechanical System) technology came into being in such background and was extensively used in many fields, such as micro mechanical and electrical, biological engineering, etc.The processes of various micro parts sometimes need one or more steps’ assembly. With the microminiaturization of manipulation objects, the research of micromanipulation technology and micro-robotics is needed imminently.On the basis of analyzing the development status of the micro-displacement mechanism driven by the piezoelectric actuator internal and abroad, a novel micro-mobile platform with 4 freedom degrees driven by the piezoelectric actuators is developed. This article mainly focused on the developing of the control system and driving power. A novel driving method is introduced in this platform. The platform can move in directions of X, Y, Z and θ. Due to the characteristics of piezoelectric actuator, the platform has the characteristics of high resolution, the ability to support high load, etc.On the basis of existing research results, the micro-mobile platform control system and the wireless micro- mobile platform control system is developed creatively. These control systems can be used to control not only the platform in experiment system but also other piezoelectric actuators in other systems. The wireless control system has the characteristics of small volume, wireless control and six control channels, etc.It’s testified by experiments that the move mechanism used in the micro-mobile platform is reasonable. It’s also testified that the control systems can meet the requirements of the micro-mobile platform.The research and experiments of control systems provide effectual experiment dependences for the farther research on micro-mobile platform. At the same time, it provides valuable experiences for the research of driving power for piezoelectrical actuator in other systems. The micro-mobile platform has widely apply foreground in micro-assembly, biological micromanipulation, etc.
Language中文
Contribution Rank1
Document Type学位论文
Identifierhttp://ir.sia.cn/handle/173321/9527
Collection机器人学研究室
Affiliation1.中国科学院沈阳自动化研究所
2.中国科学院研究生院
Recommended Citation
GB/T 7714
张江波. 纳米微动平台实验系统研究[D]. 沈阳. 中国科学院沈阳自动化研究所,2003.
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