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Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor
Liu YY(刘意杨); Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
作者部门机器人学研究室
会议名称International Conference on Nanoscience and Technology
会议日期September 1-3, 2009 in Beijing. ChinaNANO2009
会议地点Beijing, China
会议录名称International Conference on Nanoscience and Technology
2009
页码287-291
产权排序1
关键词Micromanipulation 2-d Micro Force Sensor
摘要Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the sub-micro-Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promote the complexity of micro/nano manipulation, and will facilitate to realize automating the micro/nano manipulation.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/9835
专题机器人学研究室
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning, China
2.Graduate University of the Chinese Academy of Sciences, Beijing, China
推荐引用方式
GB/T 7714
Liu YY,Wang YC,Yu P,et al. Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor[C],2009:287-291.
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