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题名: Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor
作者: Liu YY(刘意杨) ; Wang YC(王越超) ; Yu P(于鹏) ; Dong ZL(董再励)
作者部门: 机器人学研究室
会议名称: International Conference on Nanoscience and Technology
会议日期: September 1-3, 2009 in Beijing. ChinaNANO2009
会议地点: Beijing, China
会议录: International Conference on Nanoscience and Technology
出版日期: 2009
页码: 287-291
关键词: Micromanipulation ; 2-D ; Micro Force ; Sensor
摘要: Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the sub-micro-Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promote the complexity of micro/nano manipulation, and will facilitate to realize automating the micro/nano manipulation.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/9835
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
刘意杨; 王越超; 于鹏; 董再励.Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor.见:.International Conference on Nanoscience and Technology ,,2009,287-291
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