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Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor
Liu YY(刘意杨); Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
Department机器人学研究室
Conference NameInternational Conference on Nanoscience and Technology
Conference DateSeptember 1-3, 2009 in Beijing. ChinaNANO2009
Conference PlaceBeijing, China
Source PublicationInternational Conference on Nanoscience and Technology
2009
Pages287-291
Contribution Rank1
KeywordMicromanipulation 2-d Micro Force Sensor
AbstractBecause of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the sub-micro-Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promote the complexity of micro/nano manipulation, and will facilitate to realize automating the micro/nano manipulation.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/9835
Collection机器人学研究室
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning, China
2.Graduate University of the Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Liu YY,Wang YC,Yu P,et al. Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor[C],2009:287-291.
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