SIA OpenIR  > 机器人学研究室
Infinite Dimension Modeling of A Novel Micro Force Sensor and The Application in Micromanipulation
Liu YY(刘意杨); Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
Department机器人学研究室
Conference NameInternational Conference on Nanoscience and Technology, ChinaNano2009
Conference DateSeptember 1-3, 2009
Conference PlaceBeijing, China
Source PublicationInternational Conference on Nanoscience and Technology
2009
Pages273-278
Contribution Rank1
KeywordMicromanipulation Micro Force Sensor Infinite Dimension
AbstractTo accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micro/nano manipulation, a novel micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. During the application of this micro force sensor in micro/nano manipulation, the accuracy of this sensor’s model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the micro force sensor is modeling. Based on the infinite dimension model, the micro force control algorithm is designed. To verify the infinite dimension model and the control algorithm, a micromanipulation experiment is designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor, and show the efficiency of the force control algorithm. The developed micro force sensor and the infinite dimension modeling provide a feasible and versatile solution in micro force sensing and feedback force control for micro/nano manipulation, and will promote the technology of automating the micro/nano manipulation.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/9839
Collection机器人学研究室
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, China
2.Graduate University of the Chinese Academy of Sciences, China
Recommended Citation
GB/T 7714
Liu YY,Wang YC,Yu P,et al. Infinite Dimension Modeling of A Novel Micro Force Sensor and The Application in Micromanipulation[C],2009:273-278.
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