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Optically Transparent Microfluidic Systems Integrated with Carbon Nanotube Sensors
Qu YL(曲艳丽); M. X. Ouyang; Winnie W. Y. Chow; Li WJ(李文荣)
作者部门机器人学研究室
会议名称5th International Symposium on Nanomanufacturing
会议日期January 23-25, 2008
会议地点Singapore
会议录名称Proceedings of the 5th International Symposium on Nanomanufacturing
2008
页码770-775
产权排序1
摘要In this paper, we present carbon nanotube (CNT) based thermal shear stress sensors integrated inside optically transparent Polymethylmethacrylate (PMMA) microfluidic systems. The sensors were fabricated on PMMA substrates by batch assembling multi-walled carbon nanotubes (MWNTs) as sensing elements between microelectrode pairs using AC dielectrophoretic (DEP) technique. PMMA chambers were fabricated using SU-8 molding/hot-embossing technique. Then, the PMMA substrate with a micro chamber and vortex micropump was bonded to the other PMMA substrate embedded with the MWNT sensor array to form a closed flow chamber. Experiments showed that the CNT sensors could detect volumetric air flow rate in the order of 10-8m3/s inside this microchannel system. We have also proved that upon exposure to constant liquid (DI-water) flow, the electrical resistance of the CNT sensor was found to increase linearly at low activation current of 100μA. And a linear relation between the change of output resistance and one-third power of flow rate was observed for flow rate from 0.3 to 2.3m/s. This result proved that the CNT sensors work with the same principle as conventional MEMS based thermal shear stress sensors, but only require ultra-low activation power (~μW) to achieve comparable sensitivity, which is three orders of magnitude lower than conventional MEMS polysilicon based flow sensors.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/9841
专题机器人学研究室
作者单位1.Centre for Micro and Nano Systems, The Chinese University of Hong Kong
2.Engineering Building, CUHK, Shatin
3.Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences
推荐引用方式
GB/T 7714
Qu YL,M. X. Ouyang,Winnie W. Y. Chow,et al. Optically Transparent Microfluidic Systems Integrated with Carbon Nanotube Sensors[C],2008:770-775.
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