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Analysis on 3-dimensional spatial electric field of AFM based anodic oxidation
Liu ZL(刘增磊); Jiao ND(焦念东); Wang ZD(王志东); Dong ZL(董再励)
Department机器人学研究室
Conference Name7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Conference DateMarch 5-8, 2012
Conference PlaceKyoto, Japan
Author of SourceIEEE; IEEE Nanotechnology Council; The Murata Science Foundation; The Kyoto University Foundation; Office of Naval Research Global
Source Publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
PublisherIEEE Computer Society
Publication PlacePiscataway, NJ
2012
Pages547-552
Indexed ByEI
EI Accession number20122215078347
Contribution Rank1
ISBN978-1-4673-1124-3
KeywordAnodic Oxidation Atomic Force Microscopy
AbstractAtomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to find out the distribution of the spatial electric field and the relationship between the electric field and parameters. By theoretical analysis we simulated the spatial distribution of the tip/substrate electric field and analyzed the relationship between the electric field and parameters, which were verified by experiments. Our work can provide theoretic support for electric field assisted nanofabrication. 
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/9867
Collection机器人学研究室
AffiliationShenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
Recommended Citation
GB/T 7714
Liu ZL,Jiao ND,Wang ZD,et al. Analysis on 3-dimensional spatial electric field of AFM based anodic oxidation[C]//IEEE; IEEE Nanotechnology Council; The Murata Science Foundation; The Kyoto University Foundation; Office of Naval Research Global. Piscataway, NJ:IEEE Computer Society,2012:547-552.
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