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题名: Analysis on 3-dimensional spatial electric field of AFM based anodic oxidation
作者: Liu ZL(刘增磊) ; Jiao ND(焦念东) ; Wang ZD(王志东) ; Dong ZL(董再励)
作者部门: 机器人学研究室
会议名称: 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
会议日期: March 5-8, 2012
会议地点: Kyoto, Japan
会议主办者: IEEE; IEEE Nanotechnology Council; The Murata Science Foundation; The Kyoto University Foundation; Office of Naval Research Global
会议录: 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
会议录出版者: IEEE Computer Society
会议录出版地: Piscataway, NJ
出版日期: 2012
页码: 547-552
收录类别: EI
ISBN号: 978-1467311243
关键词: Anodic oxidation ; Atomic force microscopy
摘要: Atomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to find out the distribution of the spatial electric field and the relationship between the electric field and parameters. By theoretical analysis we simulated the spatial distribution of the tip/substrate electric field and analyzed the relationship between the electric field and parameters, which were verified by experiments. Our work can provide theoretic support for electric field assisted nanofabrication. 
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/9867
Appears in Collections:机器人学研究室_会议论文

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