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Analysis on 3-dimensional spatial electric field of AFM based anodic oxidation
Liu ZL(刘增磊); Jiao ND(焦念东); Wang ZD(王志东); Dong ZL(董再励)
作者部门机器人学研究室
会议名称7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
会议日期March 5-8, 2012
会议地点Kyoto, Japan
会议主办者IEEE; IEEE Nanotechnology Council; The Murata Science Foundation; The Kyoto University Foundation; Office of Naval Research Global
会议录名称2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
出版者IEEE Computer Society
出版地Piscataway, NJ
2012
页码547-552
收录类别EI
EI收录号20122215078347
产权排序1
ISBN号978-1-4673-1124-3
关键词Anodic Oxidation Atomic Force Microscopy
摘要Atomic force microscope (AFM) based anodic oxidation is an important method to fabricate nano-structures and nano-devices. To realize precise fabrication, electric field between AFM tip and substrate should be under precise control. For precise control of the electric field, a necessary topic is to find out the distribution of the spatial electric field and the relationship between the electric field and parameters. By theoretical analysis we simulated the spatial distribution of the tip/substrate electric field and analyzed the relationship between the electric field and parameters, which were verified by experiments. Our work can provide theoretic support for electric field assisted nanofabrication. 
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/9867
专题机器人学研究室
作者单位Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
推荐引用方式
GB/T 7714
Liu ZL,Jiao ND,Wang ZD,et al. Analysis on 3-dimensional spatial electric field of AFM based anodic oxidation[C]//IEEE; IEEE Nanotechnology Council; The Murata Science Foundation; The Kyoto University Foundation; Office of Naval Research Global. Piscataway, NJ:IEEE Computer Society,2012:547-552.
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