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题名: Fully automatic wafer-scale micro/nano manipulation based on optically induced dielectrophoresis
作者: Qu YL(曲艳丽) ; Zheng MJ(郑美娟) ; Liang WF(梁文峰) ; Dong ZL(董再励)
作者部门: 机器人学研究室
会议名称: 2nd International Conference on Advances in Materials and Manufacturing Processes, ICAMMP 2011
会议日期: December 16-18, 2011
会议地点: Guilin, China
会议主办者: University of Wollongong; Northeastern University; University of Science and Technology Beijing; Hebei Polytechnic University
会议录: Advanced Materials Research
会议录出版者: Trans Tech Publications
会议录出版地: Clausthal-Zellerfeld, Germany
出版日期: 2011
页码: 842-847
收录类别: CPCI(ISTP) ; EI
ISSN号: 1022-6680
ISBN号: 978-3037853252
关键词: Amorphous silicon ; Electric fields ; Electrophoresis ; Fabrication ; Innovation ; Nanosensors ; Polystyrenes ; Silicon wafers
摘要: Optically induced dielectrophoresis (ODEP) has been proved experimentally as a powerful method for efficiently manipulating some micro-scale, or even nano-scale objects. However, few ODEP platforms have been demonstrated towards the fully automatic wafer-scale manipulation and rapid fabrication of micro and nano sensors and devices. That would be of great significance to the application and industrialization of micro and nano materials. In this paper, an innovative ODEP platform for reconfigurable and automatic micro/nano-scale material manipulation is presented by combining microactuation and microvision analysis with ODEP technology. The ODEP chip consists of a typical photoconductive layer of amorphous silicon, which generates a nonuniform electric field at the light-illuminated region to induce dielectrophoretic (DEP) force for manipulating particles within the chip. A high resolution 3D motorized stage enables an accurate and rapid movement of the chip in wafer-scale. The microvision analysis program automatically recognizes the positions and sizes of randomly distributed particles and creates direct image patterns to manipulate the selected particles to form a predetermined pattern in predesired position. The programmed dynamic reconfigurable optical patterns provide increased functionality and versatility in particle manipulation. The patterning of polystyrene beads with different sizes is accomplished. This platform may be promising for rapid and wafer-scale fabrication of micro and nano sensors and devices, high-throughput bio-sample pretreatment and other applications requiring massively parallel manipulation.
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内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/9870
Appears in Collections:机器人学研究室_会议论文

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