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中国科学院沈阳自动化研究所机构知识库
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Date Issued:2017
Source Publication:Applied Surface Science
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Phase shifting-based debris effect detection in USV-assisted AFM nanomachining
期刊论文
Applied Surface Science, 2017, 卷号: 413, 页码: 317-326
Authors:
Shi JL(施佳林)
;
Liu LQ(刘连庆)
;
Yu P(于鹏)
;
Cong Y(丛杨)
;
Li GY(李广勇)
Adobe PDF(3227Kb)
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View/Download:271/70
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Submit date:2017/05/01
Atomic Force Microscopy (Afm)
Nanomachining
Ultrasonic Vibration
Thin-film
无权访问的条目
期刊论文
Authors:
Chen, Zhen
;
Ma, Ge
;
Chen ZH(陈志鸿)
;
Zhang YG(张永光)
;
Zhang, Zhe
;
Gao, Jinwei
;
Yuan MZ(苑明哲)
;
Wang, Xin
;
Liu, Junming
;
Zhou, Guofu
Adobe PDF(2228Kb)
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View/Download:189/51
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Submit date:2017/01/08