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面向二硫化钼器件的微纳操控与制造技术研究 学位论文
博士, 沈阳: 中国科学院沈阳自动化研究所, 2018
Authors:  李萌
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原子力显微镜  二硫化钼  晶向检测  深度可控加工  器件装配  
基于纳米操作机器人的超声加工与检测协同设计研究 学位论文
博士, 沈阳: 中国科学院沈阳自动化研究所, 2018
Authors:  施佳林
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纳米操作机器人  原子力显微镜  超声纳米加工  加工检测  纳米器件  
Fabrication of Sub-Micrometer-Sized MoS2 Thin-Film Transistor by Phase Mode AFM Lithography 期刊论文
Small, 2018, 卷号: 14, 期号: 49, 页码: 1-6
Authors:  Liu LQ(刘连庆);  Shi JL(施佳林);  Li M(李萌);  Yu P(于鹏);  Yang T(杨铁);  Li GY(李广勇)
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AFM lithography  MoS2  TFT fabrication  
Layer-controllable nanofabrication of two-dimensional materials with phase-mode AFM 期刊论文
Materials Letters, 2018, 卷号: 232, 页码: 43-46
Authors:  Li M(李萌);  Shi JL(施佳林);  Xi N(席宁);  Wang YC(王越超);  Liu LQ(刘连庆)
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Nanofabrication  Two-dimensional Materials  Phase-mode  Afm  
一种基于相位反馈的超声AFM闭环纳米加工装置和方法 专利
专利类型: 发明授权, 专利号: CN107188116B, 公开日期: 2017-09-22, 授权日期: 2019-03-22
Inventors:  刘连庆;  施佳林;  于鹏;  李广勇
Adobe PDF(529Kb)  |  Favorite  |  View/Download:29/8  |  Submit date:2019/03/30
一种基于相位反馈的超声AFM闭环纳米加工装置和方法 专利
专利类型: 发明, 专利号: CN107188116A, 公开日期: 2017-09-22, 授权日期: 2019-03-22
Inventors:  刘连庆;  施佳林;  于鹏;  李广勇
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Hardness determination at nanoscale by ultrasonic vibration-assisted AFM 会议论文
International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings, Montreal, Canada, July 17-21, 2017
Authors:  Shi JL(施佳林);  Liu LQ(刘连庆);  Yu P(于鹏);  Cong Y(丛杨)
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Atomic Force Microscopy  Nanomachining  Thin Film  Mechanical Properties  
Phase mode nanomachining on ultra-thin films with atomic force microscopy 期刊论文
Materials Letters, 2017, 卷号: 209, 页码: 437-440
Authors:  Shi JL(施佳林);  Liu LQ(刘连庆);  Yu P(于鹏);  Li GY(李广勇)
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Atomic Force Microscopy  Thin Films  Wear And Tribology  
Phase shifting-based debris effect detection in USV-assisted AFM nanomachining 期刊论文
Applied Surface Science, 2017, 卷号: 413, 页码: 317-326
Authors:  Shi JL(施佳林);  Liu LQ(刘连庆);  Yu P(于鹏);  Cong Y(丛杨);  Li GY(李广勇)
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Atomic Force Microscopy (Afm)  Nanomachining  Ultrasonic Vibration  Thin-film  
Laser-nanomachining by microsphere induced photonic nanojet 期刊论文
Sensors and Actuators, A: Physical, 2017, 卷号: 258, 页码: 115-122
Authors:  Wen YD(文扬东);  Wang FF(王飞飞);  Yu HB(于海波);  Li P(李盼);  Liu LQ(刘连庆);  Li WJ(李文荣)
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Laser-nanomachining  Photonic Nanojet