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Fabrication of Sub-Micrometer-Sized MoS2 Thin-Film Transistor by Phase Mode AFM Lithography 期刊论文
Small, 2018, 卷号: 14, 期号: 49, 页码: 1-6
Authors:  Liu LQ(刘连庆);  Shi JL(施佳林);  Li M(李萌);  Yu P(于鹏);  Yang T(杨铁);  Li GY(李广勇)
View  |  Adobe PDF(1895Kb)  |  Favorite  |  View/Download:220/32  |  Submit date:2018/10/08
AFM lithography  MoS2  TFT fabrication