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中国科学院沈阳自动化研究所机构知识库
Knowledge Management System of Shenyang Institute of Automation, CAS
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Collection
智能产线与系统研究室 [2]
Authors
刘伟军 [2]
王靖震 [2]
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Journal ar... [2]
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2012 [2]
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中文 [2]
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机械设计与制造 [2]
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国家科技重大专项极大... [2]
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Funding Organization：国家科技重大专项极大规模集成电路制造装备及成套工艺资助项目(2009ZX02008-003)
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基于Logistic回归的湿法刻蚀腔体气流场参数分析
期刊论文
机械设计与制造, 2012, 期号: 6, 页码: 223-225
Authors:
王靖震
;
刘伟军
Adobe PDF(402Kb)
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View/Download：599/153
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Submit date：2012/10/24
Logistic回归模型
正交试验设计
湿法刻蚀
气流场
基于均匀设计方法的热板研究
期刊论文
机械设计与制造, 2012, 期号: 5, 页码: 121-123
Authors:
王靖震
;
刘伟军
Adobe PDF(315Kb)
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View/Download：531/171
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Submit date：2012/10/24
热板
温度场
回归模型
均匀设计
