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中国科学院沈阳自动化研究所机构知识库
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Femtosecond laser-based processing methods and their applications in optical device manufacturing: A review
期刊论文
Optics and Laser Technology, 2021, 卷号: 135, 页码: 1-11
Authors:
Wang XD(王晓朵)
;
Yu HB(于海波)
;
Li PW(李佩温)
;
Zhang, YZ(章昱昭)
;
Wen YD(文扬东)
;
Qiu Y(邱野)
;
Liu Z(刘柱)
;
Li, YunPeng
;
Liu LQ(刘连庆)
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Submit date:2020/11/28
Femtosecond laser processing
Parallel processing
Microlens array
Micro/nano grating
Photon crystal
Optical fiber