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Fabrication of bottom fillet nano-mold to increase the mold lifetime 期刊论文
Journal of Nanoscience and Nanotechnology, 2017, 卷号: 17, 期号: 12, 页码: 8975-8980
Authors:  Yin, Zhifu;  Lu BL(鲁伯林);  Cheng, E.;  Sun, Lei;  Zou, Helin
Adobe PDF(3701Kb)  |  Favorite  |  View/Download:115/25  |  Submit date:2017/11/15
Numerical Simulation  Pdms Nano-mold  Pecvd  Sinx  
A novel SU-8 nanofluidic chip fabrication technique based on traditional UV photolithography 期刊论文
Microsystem Technologies, 2017, 卷号: 23, 期号: 12, 页码: 5613-5619
Authors:  Yin ZF(殷志富);  Lu BL(鲁伯林);  Zou, Helin
Adobe PDF(996Kb)  |  Favorite  |  View/Download:122/11  |  Submit date:2017/03/07