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CMP过程多变量免疫预测R2R控制方法 期刊论文
仪器仪表学报, 2012, 卷号: 33, 期号: 11, 页码: 2586-2593
Authors:  王亮;  胡静涛
View  |  Adobe PDF(1553Kb)  |  Favorite  |  View/Download:481/96  |  Submit date:2012/12/28
化学机械研磨  R2r控制  最小二乘支持向量机  贝叶斯证据框架  克隆选择  预测控制