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并行集束型半导体装备稳态吞吐量模型研究 期刊论文
半导体技术, 2012, 卷号: 37, 期号: 11, 页码: 869-873
Authors:  郑秀红;  胡静涛
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并行  集束型装备  吞吐量  模型  晶圆  
单臂集束型装备随机Petri网模型与性能分析 期刊论文
沈阳化工大学学报, 2012, 卷号: 26, 期号: 4, 页码: 360-364,369
Authors:  郑秀红;  胡静涛
View  |  Adobe PDF(798Kb)  |  Favorite  |  View/Download:312/66  |  Submit date:2013/04/21
随机petri网  集束型装备  马尔可夫过程  吞吐量  
集束型半导体装备建模与仿真技术研究 学位论文
博士, 沈阳: 中国科学院沈阳自动化研究所, 2011
Authors:  郑秀红
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半导体制造  集束型  随机petri网  建模  仿真  
基于随机Petri网的集束装备模型及马尔可夫链分析 期刊论文
信息与控制, 2011, 卷号: 40, 期号: 4, 页码: 477-482
Authors:  郑秀红;  胡静涛;  于海斌
View  |  Adobe PDF(376Kb)  |  Favorite  |  View/Download:464/20  |  Submit date:2012/05/29
随机petri网  模型  集束装备  马尔可夫链分析  吞吐率  机械臂  晶圆  加工过程  腔体  利用率  
A general throughput model for parallel cluster tools 会议论文
Advances in Intelligent and Soft Computing, Melbourne, Australia, November 19-20, 2011
Authors:  Zheng XH(郑秀红);  Yu HB(于海斌);  Hu JT(胡静涛)
View  |  Adobe PDF(204Kb)  |  Favorite  |  View/Download:471/47  |  Submit date:2012/06/06
Intelligent Robots  Manufacture  Models  Semiconductor Device Manufacture  Throughput  
Research on a simulation platform assisting analysis of the cluster tool 会议论文
ICCRD2011 - 2011 3rd International Conference on Computer Research and Development, Shanghai, China, March 11-15, 2011
Authors:  Zheng XH(郑秀红);  Hu JT(胡静涛);  Yu HB(于海斌)
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Computer Simulation  Research  
The Research of the Stochastic Reward Net Model for the Cluster Tool in Serial-parallel Mode 会议论文
2011 International Conference on Electric Information and Control Engineering, Wuhan, China, April 15-17, 2011
Authors:  Zheng XH(郑秀红);  Hu JT(胡静涛);  Yu HB(于海斌)
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The Cluster Tool  Serial-parallel  Stochastic Reward Net  Throughput  Model  
引入周期性维护的基束型装备SPN模型及仿真 期刊论文
计算机仿真, 2010, 卷号: 27, 期号: 11, 页码: 354-358
Authors:  郑秀红;  于海斌;  胡静涛
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集束型装备  故障  周期性维护  模型  仿真  
A General Throughput Model for Parallel Cluster tools 会议论文
2010 INTERNATIONAL COLLOQUIUM ON COMPUTING, COMMUNICATION, CONTROL, AND MANAGEMENT (CCCM2010), VOL I, Yangzhou, CHINA, Augest 20-22, 2010
Authors:  Zheng XH(郑秀红);  Yu HB(于海斌);  Hu JT(胡静涛)
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parallel  cluster tools  throughput  model  timing diagram